2017
DOI: 10.1364/ao.56.009888
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Holographic fabrication of graded photonic super-crystals using an integrated spatial light modulator and reflective optical element laser projection system

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Cited by 26 publications
(28 citation statements)
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“…A gold film was then deposited, and the positive resist was lifted off. The gold film initiated silicon growth for 200 nm (filling the groove of the pattern) [27]. Gold was again deposited over the entire flat surface to initiate the silicon film growth to a thickness of 300 nm.…”
Section: Description Of Graded Photonic Super-crystals and Simulationmentioning
confidence: 99%
See 2 more Smart Citations
“…A gold film was then deposited, and the positive resist was lifted off. The gold film initiated silicon growth for 200 nm (filling the groove of the pattern) [27]. Gold was again deposited over the entire flat surface to initiate the silicon film growth to a thickness of 300 nm.…”
Section: Description Of Graded Photonic Super-crystals and Simulationmentioning
confidence: 99%
“…When the lattice constant is above 500 nm, eight-beam interference lithography (four inner beams with an interference angle of α and four outer beams with an interference angle of β) can be used to fabricate the pattern [26,27]. A GPSC with a unit super-cell size of 26a × 26a (with a = 1100 nm) has been fabricated using eight-beam interference [27]. The unit super-cell size can be controlled by the selection of angles α and β [27].…”
Section: Description Of Graded Photonic Super-crystals and Simulationmentioning
confidence: 99%
See 1 more Smart Citation
“…Very recently, graded photonic super-crystals (GPSCs) have been fabricated through the interference lithography by two sets of multiple beams arranged in a cone geometry [12][13][14]. The GPSC has two sets of lattices: the rod size (or hole size) increases gradually along one direction in one set of lattices while the other set decreases their sizes gradually.…”
Section: Introductionmentioning
confidence: 99%
“…The GPSC has two sets of lattices: the rod size (or hole size) increases gradually along one direction in one set of lattices while the other set decreases their sizes gradually. GPSC has dual period and even dual symmetry: The square lattices in GPSC have a small period while graded regions have their own symmetry and period [12][13][14]. GPSCs can be used to enhance the broadband light trapping in an Si solar cell, broadband light extraction from organic light emitting diode, and to form a resonance cavity at the boundary of graded and less-graded regions [15][16][17].…”
Section: Introductionmentioning
confidence: 99%