Holographic imaging technique for characterization of MEMS switch dynamics

Abstract

An innovative holographic imaging technique is applied in characterization of MEMS switch non-linear dynamics. The Duffing's non-linear oscillator based phenomenological model was adopted to study MEMS switch non-linear response due to the complicated contact phenomena and corresponding boundary conditions. An experimental contact measurement result of MEMS cantilever response that matches theoretical trends is provided. Non-destructive contact measurements were performed by means of quantitative nanomechnical test instruments. Non-contact holographic characterization method yielded results comparable with phenomenological model and contact measurements. The proposed holographic characterization method consists of digitized holographic measurements enhanced by the FEM eigenvector problem solution. Two cases were analyzed for simple and perturbated sinusoidal excitations that correspond to the free and contact boundary conditions, respectively.

Design and Analysis of Viscometric Sensor with Embedded Microstruc-ture for Biomedical Applications

“…To verify created FEM model and for visualization of mode vibration of cantilever the method of holographic interferometry was used [11]. The holographic interferograms of working viscometric sensor in the liquid without glucose and with glucose are presented in Fig.…”

High frequency separation of suspended micro/nanoparticles

“…Innovative holographic imaging technology used to characterize the nonlinear dynamics of the vibrating structures [7,8]. The phenomenological model of the nonlinear Duffing is appropriate to study the nonlinear response of the piezoelectric transducer, which actuates liquid with micro/nanoparticles.…”

Stroboholography for the Analysis of Vibration Modes of Mechanical Systems

“…does not produce acceptable results. A typical example is holographic analysis of a micro-electromechanical switch which is described in [5].…”