Homodyne laser interferometer involving minimal quadrature phase error to obtain subnanometer nonlinearity

Cui, Junning; He, Zhangqiang; Jiu, Yuanwei; Tan, Jiubin; Sun, Tao

doi:10.1364/ao.55.007086

Cited by 21 publications

(14 citation statements)

References 18 publications

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“…[49] Gyakorlatban jelfeldolgozás szempontjából jellemzően a heterodin kvadratúra demodulációval találkozunk. A kvadratúrás elrendezés segít meghatározni a mozgás irányát és csökkenteni a lézerforrásból származó teljesítményingadozások hatását, ezzel az érzékenység javulását idézi elő [50], [51]. Emellett az alacsony frekvenciájú zaj kiszűrhető, ami a homodin technikánál nehéz.…”

Section: Lézer Doppler Vibrométerunclassified

Lézeres mérések alkalmazása forgácsoláskor. Monitoring és a lézeres érzékelők

Béres

2020

MDT

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A cikk célja, hogy néhány példán keresztül felvázolja azokat a lehetőségeket, amelyeket a lézeres mérések kínálnak fúrás, marás és esztergálás vizsgálatára. Olyan munka eddig nem jelent meg, amely a klasszikus forgácsolási technikák esetén külön-külön igyekszik összefoglalni az egyes hagyományos forgácsolásleválasztási technológiákra vonatkozó méréseket. Nem titkolt célja, hogy a lézeres méréstechnika előnyeit és hátrányait is bemutassa, figyelembe véve a mérési körülményeket is. Mindezeket a forgácsolás felügyeletben való alkalmazáshatóságának szem előtt tartásával kívánja bemutatni.

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Section: Lézer Doppler Vibrométerunclassified

Lézeres mérések alkalmazása forgácsoláskor. Monitoring és a lézeres érzékelők

Béres

2020

MDT

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“…Therefore, the measurement accuracy of this measurement structure will be affected by the nonlinearity error during the measurement. The formula for the analysis of the nonlinearity error is revealed in Equation 5, where I x and I y are the interferometric signals, ψ represents the ideal phase, and m is a constant [13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors

et al. 2020

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Due to the common path structure being insensitive to the environmental disturbances, relevant Fabry–Pérot interferometers have been presented for displacement measurement. However, the discontinuous signal distribution exists in the conventional Fabry–Pérot interferometer. Although a polarized Fabry–Pérot interferometer with low finesse was subsequently proposed, the signal processing is complicated, and the nonlinearity error of sub-micrometer order occurs in this signal. Therefore, a differential quadrature Fabry–Pérot interferometer has been proposed for the first time. In this measurement system, the nonlinearity error can be improved effectively, and the DC offset during the measurement procedure can be eliminated. Furthermore, the proposed system also features rapid and convenient replacing the measurement mirrors to meet the inspection requirement in various measuring ranges. In the comparison result between the commercial and self-developed Fabry–Pérot interferometer, it reveals that the maximum standard deviation is less than 0.120 μm in the whole measuring range of 600 mm. According to these results, the developed differential Fabry–Pérot interferometer is feasible for precise displacement measurement.

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“…However, the intensity and frequency instability of the light source dominates the measurement uncertainty of displacement-measuring interferometers. Normally, thermally-stabilized He-Ne lasers, of single or dual frequency, are used [1][2][3][4]. However, a frequency stability in the order of 10 −6 -10 −8 and an intensity stability of 0.1% are insufficient for measurements at a nanometer order of accuracy.…”

Section: Introductionmentioning

confidence: 99%

A Displacement Measuring Interferometer Based on a Frequency-Locked Laser Diode with High Modulation Frequency

Hoang

et al. 2020

Applied Sciences

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Laser interferometers can achieve a nanometer-order uncertainty of measurements when their frequencies are locked to the reference frequencies of the atom or molecule transitions. There are three types of displacement-measuring interferometers: homodyne, heterodyne, and frequency modulation (FM) interferometers. Among these types of interferometer, the FM interferometer has many advantageous features. The interference signal is a series of time-dependent harmonics of modulation frequency, so the phase shift can be detected accurately using the synchronous detection method. Moreover, the FM interferometer is the most suitable for combination with a frequency-locked laser because both require frequency modulation. In previous research, low modulation frequencies at some tens of kHz have been used to lock the frequency of laser diodes (LDs). The low modulation frequency for the laser source means that the maximum measurement speed of the FM interferometers is limited. This paper proposes a novel contribution regarding the application of a high-frequency modulation for an LD to improve both the frequency stability of the laser source and the measurement speed of the FM interferometer. The frequency of the LD was locked to an I2 hyperfine component at 1 MHz modulation frequency. A high bandwidth lock-in amplifier was utilized to detect the saturated absorption signals of the I2 hyperfine structure and induce the signal to lock the frequency of the LD. The locked LD was then used for an FM displacement measuring interferometer. Moreover, a suitable modulation amplitude that affected the signal-to-noise ratio of both the I2 absorption signal and the harmonic intensity of the interference signal was determined. In order to verify the measurement resolution of the proposed interferometer, the displacement induced by a piezo electric actuator was concurrently measured by the interferometer and a capacitive sensor. The difference of the displacement results was less than 20 nm. To evaluate the measurement speed, the interferometer was used to measure the axial error of a high-speed spindle at 500 rpm. The main conclusion of this study is that a stable displacement interferometer with high accuracy and a high measurement speed can be achieved using an LD frequency locked to an I2 hyperfine transition at a high modulation frequency.

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Homodyne laser interferometer involving minimal quadrature phase error to obtain subnanometer nonlinearity

Cited by 21 publications

References 18 publications

Lézeres mérések alkalmazása forgácsoláskor. Monitoring és a lézeres érzékelők

Lézeres mérések alkalmazása forgácsoláskor. Monitoring és a lézeres érzékelők

Investigation on the Differential Quadrature Fabry–Pérot Interferometer with Variable Measurement Mirrors

A Displacement Measuring Interferometer Based on a Frequency-Locked Laser Diode with High Modulation Frequency

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