Homoepitaxial Growth of Gan Thin Film Using Radical Assist Sputter Epitaxy Method at Low Temperature

Takeuchi, Masato; Ishikawa, Ryo; Hanna, Taku; Sato, Seichi; Kurashiki, Tetsusei

doi:10.2139/ssrn.5046292

2024

DOI: 10.2139/ssrn.5046292

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Homoepitaxial Growth of Gan Thin Film Using Radical Assist Sputter Epitaxy Method at Low Temperature

Masato Takeuchi,

Ryo Ishikawa,

Taku Hanna

et al.

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Homoepitaxial Growth of Gan Thin Film Using Radical Assist Sputter Epitaxy Method at Low Temperature

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References 38 publications

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