Hot embossing of micro-featured devices

Chen, S.C.; Lin, Ming‐Chung; Chien, Rean‐Der; Liaw, Wei-Liang

doi:10.1109/icmech.2005.1529360

Cited by 6 publications

(2 citation statements)

References 9 publications

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“…The hot embossing of thermoplastic polymeric materials is a micro-fabrication process that is particularly valuable for the production of microfluidic devices [1][2][3][4]. In hot embossing, a hard, reusable, patterned stamp 4 is pressed into a softened thermoplastic plate, often of thickness ∼1 mm, which is then cooled to freeze its deformation in place before the stamp is removed.…”

Section: Introductionmentioning

confidence: 99%

A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers

Taylor

Hale

Lam

et al. 2010

J. Micromech. Microeng.

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Users of hot micro-embossing often wish to simulate numerically the topographies produced by the process. We have previously demonstrated a fast simulation technique that encapsulates the embossed layer's viscoelastic properties using the response of its surface topography to a mechanical impulse applied at a single location. The simulated topography is the convolution of this impulse response with an iteratively found stamp-polymer contact-pressure distribution. Here, we show how the simulation speed can be radically increased by abstracting feature-rich embossing-stamp designs. The stamp is divided into a grid of regions, each characterized by feature shape, pitch and areal density. The simulation finds a contact-pressure distribution at the resolution of the grid, from which the completeness of pattern replication is predicted. For a 25 mm square device design containing microfluidic features down to 5 μm diameter, simulation can be completed within 10 s, as opposed to the 10 4 s expected if each stamp feature were represented individually. We verify the accuracy of our simulation procedure by comparison with embossing experiments. We also describe a way of abstracting designs at multiple levels of spatial resolution, further accelerating the simulation of patterns whose detail is contained in a small proportion of their area.

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Section: Introductionmentioning

confidence: 99%

A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers

Taylor

Hale

Lam

et al. 2010

J. Micromech. Microeng.

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show abstract

“…Lithographic methods such as focused beam lithography, UV lithography, and X-ray lithography are relatively slow and expensive, and as a result these methods are suitable for prototyping and small volume production. In contrast, the hot embossing process Jaszewski et al 1998;Moon et al 2005;Chang and Yang 2005;Shan et al 2005;Chen et al 2005;Scheer et al 2004), which has demonstrated 10 nm resolution Scheer et al 2004), is becoming a dominant fabrication method for nano/microstructures when low cost and high throughput are desired.…”

Section: Introductionmentioning

confidence: 89%

Rapid hot embossing of polymer microfeatures

et al. 2006

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Although the hot embossing process is gaining popularity in molding polymer micro/nano structures, it needs a breakthrough improvement in reducing cycle time before it can become a mass-production process. In this study, an embossing tool with a rapid heating and cooling capability was investigated to reduce the cycle time. During the process, the embossing tool was rapidly heated to above the polymer softening temperature (in less than a couple of seconds), pressed against a roomtemperature polymer substrate, and subsequently rapidly cooled for mold separation. Different miniaturized features including microsquare and hexagonal wells, microcircular holes, and submicron surface features were successfully produced using the new process with a total embossing cycle time around 20 s. The fatigue test result indicated that the new embossing technology is durable and reliable for microscale feature replication.

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Hot roller embossing of multi-dimensional microstructures using elastomeric molds

Zhong

Chen

et al. 2017

Microsyst Technol

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Hot embossing of micro-featured devices

Cited by 6 publications

References 9 publications

A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers

A method for the accelerated simulation of micro-embossed topographies in thermoplastic polymers

Rapid hot embossing of polymer microfeatures

Hot roller embossing of multi-dimensional microstructures using elastomeric molds

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