Laser-Induced Damage in Optical Materials 2022 2022
DOI: 10.1117/12.2641982
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Hot spot monitoring of ArF laser at HDC and high energy mode using low reflective beam splitter

Abstract: We developed a low reflective beam splitter (BS) for hot-spot monitoring of argon-fluoride (ArF) laser, and detected hot-spot in a laser beam profile only at high discharge current and high output power mode.

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Cited by 2 publications
(2 citation statements)
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“…For example, Haze formation is known as a characteristic optical defect after CaF2 exposed to a high ArF laser dose [10]. Highenergy X-ray exposure provides an effective way to symulate point defect formation and mobilization in comparison to ArF laser based accelerated lifetime damage test (ALDT) [11].…”
Section: High-energy X-ray Colorationmentioning
confidence: 99%
“…For example, Haze formation is known as a characteristic optical defect after CaF2 exposed to a high ArF laser dose [10]. Highenergy X-ray exposure provides an effective way to symulate point defect formation and mobilization in comparison to ArF laser based accelerated lifetime damage test (ALDT) [11].…”
Section: High-energy X-ray Colorationmentioning
confidence: 99%
“…Fig. 1 illustrates laser-induced damage testing in three different operation conditions: 1) use case lifetime testing (UCLT), 2) accelerated lifetime damage testing (ALDT), and 3) laser-induced damage threshold (LIDT) testing [1]. The LIDT is a well-known methodology to get quick feedback of a laser optic performance at high laser fluence or energy density.…”
Section: Laser-induced Damage Testingmentioning
confidence: 99%