The superplastic behavior of Inconel 718 superalloy with particular emphasis on the microstructural evolution has been systematically investigated through tensile tests at the strain rate of 10 À3 s À1 and the temperatures ranging from 1223 K to 1253 K (950°C to 980°C). Its elongations exceeded 300 pct under all of the experimental conditions and peaked a maximum value of 520 pct at 1223 K (950°C). Moreover, the stress reached the top value at the strain of 0.3, and then declined until the tensile failure. In addition, we have found that the grain size reduced after deformation while the d phase precipitation increased. Microstructural evolution during the superplasticity was characterized via transmission electron microscope, and the randomly distributed dislocation, dislocation network, dislocation arrays, low-angled subgrains, and high-angled recrystallized new grains were observed in sequence. These new grains were found to nucleate at the triple junction, twin boundary, and near the d phase. Based on these results, it is deemed that the discontinuous dynamic recrystallization occurred as the main mechanism for the superplastic deformation of Inconel 718 alloy.