The resistivity of SrRuO 3 thin films on (001) SrTiO 3 substrates grown at different temperatures by pulsed laser deposition is correlated to the microstructure. Films grown at 775°C are of an orthorhombic structure, contain very few defects, and exhibit a low resistivity of 150 ⍀ cm. Films grown at other temperatures contain a cubic phase and show higher resistivities. The defects present in the films, particularly twins and antiphase boundaries, are analyzed by high-resolution transmission electron microscopy, and their origin, as well as influence on film resistivity, is discussed.