2017
DOI: 10.3390/ma10020200
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HRTEM Microstructural Characterization of β-WO3 Thin Films Deposited by Reactive RF Magnetron Sputtering

Abstract: Though tungsten trioxide (WO3) in bulk, nanosphere, and thin film samples has been extensively studied, few studies have been dedicated to the crystallographic structure of WO3 thin films. In this work, the evolution from amorphous WO3 thin films to crystalline WO3 thin films is discussed. WO3 thin films were fabricated on silicon substrates (Si/SiO2) by RF reactive magnetron sputtering. Once a thin film was deposited, two successive annealing treatments were made: an initial annealing at 400 °C for 6 h was fo… Show more

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Cited by 20 publications
(6 citation statements)
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“…Figure 12 illustrates the theoretically modeled Pnma structure of the system (16 atoms in the unit-cell). Several phases of this system were experimentally characterized and analysed by exploring the sequence of temperature-induced phase transitions in WO 3 219 . They were rationalized in terms of changes in the octahedral tilt of the system and/or displacements of W from the center of the WO 6 octahedron.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 12 illustrates the theoretically modeled Pnma structure of the system (16 atoms in the unit-cell). Several phases of this system were experimentally characterized and analysed by exploring the sequence of temperature-induced phase transitions in WO 3 219 . They were rationalized in terms of changes in the octahedral tilt of the system and/or displacements of W from the center of the WO 6 octahedron.…”
Section: Resultsmentioning
confidence: 99%
“…Among various applications, the photocatalyst application for degrading organic pollutants receives much attention as WO 3 has the advantages of low cost, high chemical stability, and excellent process-dependent reproducibility. In general, pure WO 3 crystal shows five phase transitions at temperatures ranging from −180 to 900 • C [3]. Among the five crystal forms, a monoclinic I WO 3 phase is the stable phase at room temperature.…”
Section: Introductionmentioning
confidence: 99%
“…This can be attributed to a higher kinetic energy leading to diffusion of the impinging species on the substrate surface with increasing T s . As such, the grain boundary migration and restructuring become prevalent, leading to a dense microstructure. As noted in the literature, the sputter-deposited film interface microstructure is highly dependent on the adatom/particle energy of the growing film. In general, the volume of voids/pores in the films tends to increase with decreasing adatom or particle energy. These voids can also form as a consequence of surface roughness and shadowing effects, leading to the development of the loose columnar structure.…”
Section: Results and Discussionmentioning
confidence: 99%