“…Numerous materials have been utilized for humidity sensing, of which the metal oxides that are physically and chemically stable have been extensively investigated at both room and elevated temperatures. Sensors based on changes in resistance and capacitance, as shown in Fig.4.1, are preferred owing to their compact size, which could facilitate miniaturization required for electronic circuitry (Pokhrel et al, 2003 They are nowadays widely used in the detection of gases. Semiconductor oxide gas sensors are extensively studied in order to improve their sensing characteristics, i.e., sensitivity, selectivity, stability, and response rate, to various kinds of gases and to meet the increasing needs of sensors in complicated systems and under strict conditions.…”