1993
DOI: 10.1016/0925-4005(93)85336-9
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Humidity sensor using sol—gel-derived silica coating on quartz crystal

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Cited by 30 publications
(11 citation statements)
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“…Processability of such designs, however, can be somewhat tedious requiring high temperatures and a multilayered construction to the sensor substrate. The use of sol-gels has improved this processability [10][11][12][13][14], but most designs still require a glass or quartz crystal substrate which can restrict the degree of miniaturisation.…”
Section: Introductionmentioning
confidence: 99%
“…Processability of such designs, however, can be somewhat tedious requiring high temperatures and a multilayered construction to the sensor substrate. The use of sol-gels has improved this processability [10][11][12][13][14], but most designs still require a glass or quartz crystal substrate which can restrict the degree of miniaturisation.…”
Section: Introductionmentioning
confidence: 99%
“…It has been used as gas sensors [15][16][17][18], liquid phase ion sensors [19][20][21][22][23][24][25][26][27], biosensors [22,23], DNA reaction monitors [24] and so on. The QCM technology incorporated with humidity sensitive material is a good solution for humidity sensing application [3,4,6]. Various kinds of polymer coatings are reported as the sensing material, but the large hysteresis and the narrow active range are the main problems to be overcome.…”
Section: Introductionmentioning
confidence: 99%
“…Various principles, capacitive, resistive, gravimetric, microwave, etc. [3][4][5][6][7], have so far been investigated for humidity sensors, by employing different kinds of sensing materials, such as metal oxides, polymers and porous inorganic/organic materials [2][3][4][5][6][7].…”
Section: Introductionmentioning
confidence: 99%
“…Processability of such designs however can be somewhat tedious requiring high temperatures and a multi layered construction to the sensor substrate. The use of sol-gels has improved this processability [15][16][17][18][19] but most designs still require a glass or quartz crystal substrate which can restrict the degree of miniaturisation.…”
Section: Introductionmentioning
confidence: 99%