2019
DOI: 10.3390/s19030659
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Humidity Sensors with Shielding Electrode Under Interdigitated Electrode

Abstract: Recently, humidity sensors have been investigated extensively due to their broad applications in chip fabrication, health care, agriculture, amongst others. We propose a capacitive humidity sensor with a shielding electrode under the interdigitated electrode (SIDE) based on polyimide (PI). Thanks to the shielding electrode, this humidity sensor combines the high sensitivity of parallel plate capacitive sensors and the fast response of interdigitated electrode capacitive sensors. We use COMSOL Multiphysics to d… Show more

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Cited by 27 publications
(18 citation statements)
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“…On the other hand, polymer materials have long been used as humidity sensors because of their availability in various forms. In dielectric type humidity sensors, polymer materials such as polyimide [18], polymethyl methacrylate (PMMA) [19], and polyvinyl alcohol (PVA) [20], have been used to bind water molecules between two electrodes such that humidity measurement can be performed through changes in the dielectric constant of the polymer materials.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, polymer materials have long been used as humidity sensors because of their availability in various forms. In dielectric type humidity sensors, polymer materials such as polyimide [18], polymethyl methacrylate (PMMA) [19], and polyvinyl alcohol (PVA) [20], have been used to bind water molecules between two electrodes such that humidity measurement can be performed through changes in the dielectric constant of the polymer materials.…”
Section: Introductionmentioning
confidence: 99%
“…Table 1 shows the performance comparison of the fabricated humidity sensor to a previous research work on humidity sensors. Generally, the reported PI-based humidity sensors have two types, capacitive humidity sensor 17,46,58,59 and LC resonance humidity sensor. 24,37 Capacitance-type humidity sensors have high sensitivity and large RH range.…”
Section: Resultsmentioning
confidence: 99%
“…Table shows the performance comparison of the fabricated humidity sensor to a previous research work on humidity sensors. Generally, the reported PI-based humidity sensors have two types, capacitive humidity sensor ,,, and LC resonance humidity sensor. , Capacitance-type humidity sensors have high sensitivity and large RH range. , However, they have issues of power supply and long response and recovery time, which limit their application. In contrast, humidity sensor based on LC resonance has the advantages of noncontact, battery-less, and fast response time, which induces tremendous interest.…”
Section: Resultsmentioning
confidence: 99%
“…Relative Humidity (RH) and Air Temperature (T) data recorded during UAV flights are critical parameters to interpret vertical profiles performed with atmospheric sensors, providing information on the Planetary Boundary Layer Height (inversion layer), the altitude of specific atmospheric (dust) layers and clouds in the free troposphere, as well as the influence of water absorption onto ambient aerosols (RH). These measurements are obtained with the HC2-ROPCB sensor (from the Rotronic Company [33]) mounted below the aircraft's wing. A customized 3-D printed probe is housing the sensor to protect it from possible shocks and direct solar irradiance while ensuring proper air flow during flight.…”
Section: Meteorological Sensorsmentioning
confidence: 99%