2013
DOI: 10.1016/j.tsf.2012.11.153
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Hybrid antireflective coating with plasma-etched nanostructure

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Cited by 14 publications
(6 citation statements)
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“…In another study by Schulz et al, a dense silica layer and melamine SWSs were deposited via plasma ion–assisted deposition before etching. The resulting hybrid AR coating was capped with silica, which enabled an antireflectance over the wavelength range of 400–800 nm for 0°, 45°, 60°, at about 1% reflectance on average …”
Section: Ar Coatingsmentioning
confidence: 99%
“…In another study by Schulz et al, a dense silica layer and melamine SWSs were deposited via plasma ion–assisted deposition before etching. The resulting hybrid AR coating was capped with silica, which enabled an antireflectance over the wavelength range of 400–800 nm for 0°, 45°, 60°, at about 1% reflectance on average …”
Section: Ar Coatingsmentioning
confidence: 99%
“…However, preparation of thin coatings with significant AR properties requires some complicated and/or expensive processes such as vacuum deposition, nanoimprinting, nanoetching, and multistep surface treatments. ,, Most of the conventional AR coatings are also applicable only to flat surfaces owing to the requirement of nanometer-level thickness control of the AR layers. AR coatings for plastic substrates are more restricted than those for inorganic substrates because organic polymers exhibit low heat resistance, easy deformation, and low adhesion for inorganic low- n materials such as silica-based coatings.…”
Section: Introductionmentioning
confidence: 99%
“…There are many production techniques to fabricate biomimetic micro-nano structures, including nano-sphere lithography, laser-interference lithography, decal transfer lithography, nanoimprinting lithography, and plasma etching, which are used on various substrates such as glass, silicon, polymers, etc. [19][20][21][22][23][24][25][26] Nanostructured polymeric materials in particular, are attracting interest due to their wide usage in biomolecular sensing, optics and optoelectronic applications. [27][28][29][30] In order to produce polymer nanostructures, hot embossing through a mold is applied in the pre-mentioned fabrication techniques.…”
Section: Introductionmentioning
confidence: 99%