In this work, hybrid
density functional theory calculations are
used to evaluate the structural and electronic properties and formation
energies of Si-doped β-Ga2O3. Overall,
eight interstitial (Sii) and two substitutional (SiGa) positions are considered. In general, our results indicate
that the formation energy of such systems is significantly influenced
by the charge state of the defect. It is confirmed that it is energetically
more favorable for the substitution process to proceed under Ga-poor
growth conditions than under Ga-rich growth conditions. Furthermore,
it is confirmed that the formation of SiGaI with a tetrahedral
coordination geometry is more favorable than the formation of SiGaII with an octahedral one. Out of all considered interstitial
positions, due to the negative formation energy of the Si +3 charge
state at i8 and i9 interstitial positions over
the wide range of Fermi energy, this type of defect can be spontaneously
stable. Finally, due to a local distortion caused by the presence
of the interstitial atom as well as its charge state, these systems
obtain a spin-polarized ground state with a noticeable magnetic moment.