Hybrid Integrated RF-MEMS Phased Array Antenna at 10GHz

Gautier, W.; Stehle, A.; Siegel, C.; Schoenlinner, Bernhard; Ziegler, Volker; Prechtel, U.; Menzel, Wolfgang

doi:10.1109/eumc.2008.4751407

Cited by 5 publications

(2 citation statements)

References 10 publications

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“…The first example on the left is an X-band phased array antenna, operating at 9.5 GHz, in which four of the 3-bit switched line phase shifters (D) described earlier in this paper, are integrated [28]. The antenna itself is realized on an organic RF-substrate with a FR-4 layer underneath for DC-routing.…”

Section: Electronically Steerable Antennasmentioning

confidence: 99%

The low-complexity RF MEMS switch at EADS: an overview

Schoenlinner¹,

Stehle²,

Siegel

et al. 2011

Int. J. Microw. Wireless Technol.

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This paper gives an overview of the low-complexity radio frequency microelectromechanical systems (RF MEMS) switch concept and technology of EADS Innovation Works in Germany. Starting in 2003, a capacitive switch concept, which is unique in several aspects, was developed to address specific needs in the aeronautic and space. Thermally grown silicon oxide as dielectric layer, the silicon substrate as actuation electrode, and a conductive zone realized by ion implantation make the EADS RF MEMS switch a very simple, low-cost, and reliable approach. In this document, data on experimental investigations are presented, which demonstrate outstanding performance figures in terms of insertion loss, isolation, frequency range, bandwidth, RF-power handling, and robustness with respect to thermal load. Based on this concept, numerous different circuits in particular single-pole single-throws (SPSTs), single-pole multi-throws (SPMTs), tunable filters, phase shifters, and electronically steerable antennas between 6 and 100 GHz have been designed, fabricated, and characterized.

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Section: Electronically Steerable Antennasmentioning

confidence: 99%

The low-complexity RF MEMS switch at EADS: an overview

Schoenlinner¹,

Stehle²,

Siegel

et al. 2011

Int. J. Microw. Wireless Technol.

Self Cite

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show abstract

“…Reference [2] describes a one dimensional RF-MEMS phased array for operation at 9.5 GHz. Each antenna is a 4 * 8 array of patch elements and the phase shifting property is achieved by four 3 bit RF-MEMS phase shifters.…”

Section: Introductionmentioning

confidence: 99%

Coplanar Mems Phased Array Antenna Using Koch Fractal Geometry

Jahanbakht¹,

Lotfi-Neyestanak²

2011

PIER M

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Abstract-A 3-bit phase array system including phase shifter blocks and antenna elements has been developed on a coplanar waveguide (CPW) using micro electromechanical system (MEMS) technology. The non Euclidean Koch fractal geometry has been used to improve the frequency behavior of the entire system. It is shown that the fractal geometry makes the design to have lower profile, wider frequency bandwidth, and lower mutual coupling effects. It also decreases the actuation voltage of the MEMS switch elements. The fabrication process has been fully described and the measured values regarding every single block is presented.

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