2008
DOI: 10.1143/jjap.47.6978
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Hybrid Laser Cutting for Flat Panel Display Glass

Abstract: A new laser glass cutting technology using femtosecond and CO 2 lasers is presented. Mechanical breaking after scribing using a femtosecond laser was evaluated and compared with the hybrid method for the cutting of flat panel display (FPD) glass. Various laser fluences were tested to determine the threshold energy and optimum grooving conditions without microcracks. The hybrid method was very effective for the FPD glass microfabrication and for performing full cutting without the mechanical breaking process. C… Show more

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Cited by 20 publications
(8 citation statements)
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“…where b is the binding energy, J i is the ionization potential, l s / A is a ratio of skin depth to absorption coefficient, and n e is the free electron density. Experimental ablation thresholds for dielectric materials such as silica 20 and glass 21 are reported to be reasonably approximated by this expression. Cortical bone 22 is composed of 70% inorganic material and 30% proteins.…”
Section: Figmentioning
confidence: 89%
“…where b is the binding energy, J i is the ionization potential, l s / A is a ratio of skin depth to absorption coefficient, and n e is the free electron density. Experimental ablation thresholds for dielectric materials such as silica 20 and glass 21 are reported to be reasonably approximated by this expression. Cortical bone 22 is composed of 70% inorganic material and 30% proteins.…”
Section: Figmentioning
confidence: 89%
“…However, the beam size and the quality of the CO 2 laser beam are limited to producing high-quality ablation on the glass. A UV laser also has a high absorption rate in glass, and its beam quality is relatively good due to its short wavelength [23]. Ablation of a glass surface can produce well-defined edges or an ablated micro-structure in which the ablated material can be precisely removed.…”
Section: Introductionmentioning
confidence: 99%
“…In industrial glass-melting tanks 14) and laboratory glass-melting crucible, temperature gradients would induce the Soret effect. Furthermore, laser irradiation during laser welding 15) and cutting 16) of glasses would also induce the Soret effect because the small focal spot produces a steep temperature gradient. Measuring Soret coefficients will enable us to discuss and predict damage, such as stress and inhomogeneity, caused by laser irradiation.…”
Section: )7)mentioning
confidence: 99%