“…With in mind the idea of developping hybrid paramagnetic-ferromagnetic SiC based quantum processors or sensors, as recently proposed, 4,7,8 here we first demonstrate a new methodology for creating shallow VSi spin qubits located at a controlled nanoscale distance below the SiC surface by low energy ion implantation through a sacrificial SiO 2 layer, and then, we demonstrate by various magnetic resonance methods, that our shallow silicon vacancies spin qubits are 1/ coupled to an electronic spin bath, 2/ can be also coupled to the stray magnetic field of a nearby YIG ferrimagnetic thin film, and 3/, that despite the interaction with the spin bath, they remain quantum coherent, even at room temperature, which is quite promising for the development of quantum sensors and processors based on shallow Vsi spin qubits in 4H-SiC.…”