2022
DOI: 10.1002/adem.202200733
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Hybrid Ni–Co–Ni Structures Prepared by Magnetophoresis as Efficient Permanent Magnets for Integration into Microelectromechanical Systems

Abstract: The direct integration of performant permanent magnets (PMs) within miniaturized circuits remains both a scientific and a technological challenge. Magnetophoresis‐driven capillary assembly of hard magnetic nanoparticles is a promising approach to fabricate 3D rare‐earth‐free PMs. However, this process implies the use of soft magnetic blocks to generate the magnetic field gradients required to localize the assembly directly onto silicon substrates. The impact of these soft elements onto the overall magnetic pro… Show more

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