Hybrid Organic-Inorganic Optical Films Deposited by Ion Beam Assisted CVD

Zabeida, O.; Vernhes, Richard; Poirié, Thomas; Chiarotto, Sebastien; Scherer, Karin; Schmitt, Thomas; Marushka, V. I.; Klemberg-Sapieha, Jolanta E.; Martinů, L.

doi:10.1364/oic.2013.tha.4

Cited by 4 publications

(9 citation statements)

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“…These variations allow H/E ratio (strain to failure) adjustment to values up to 0.12-0.15 emphasizing the coatings' resilience (Figure 3c). In addition, the enhanced mechanical coating performance has high elastic recovery, R, in excess of 60 % (Figure 3d) as reported in previous work [11].…”

Section: Durability Of Single Layerssupporting

confidence: 84%

“…In the former case, a 3-A emission current and an oxygen flow of 15 or 30 sccm was applied. O-I silica was deposited by IBACVD [11] using the DMTS precursor and oxygen ions. Note that no SiO 2 was evaporated in this process, and the film was grown from the precursor reacting with the oxygen ions.…”

Section: Methodology Depositionmentioning

confidence: 99%

“…In AR coatings, Schulz et al proposed the use of an O-I approach consisting of a low index material obtained by plasma etching of a polymer layer sandwiched between two SiO 2 layers [10].Ion-beam-assisted chemical vapor deposition (IBACVD) was introduced into the laboratory process where O-I optical coatings are prepared by using ion bombardment through a precursor atmosphere toward a substrate. The O-I coatings exhibit enhanced elastic recovery, higher strain to failure, and lower water uptake compared to standard mineral SiO 2 layers [11]. When incorporated in AR coating stacks on plastic optics, their presence results in enhanced thermomechanical properties and higher color stability.…”

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confidence: 99%

“…When incorporated in AR coating stacks on plastic optics, their presence results in enhanced thermomechanical properties and higher color stability. Improved elastoplastic properties were also shown for highindex O-I materials such as TiOSiCH [12]. The coating's hydrophobic characteristics improve the color stability [13] by preventing water from entering the pores, making O-I materials very attractive for use in ophthalmic applications.…”

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confidence: 99%

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Vacuum Polymerization of Active Devices

2016

59th Annual Technical Conference Proceedings

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environmental fluctuations can cause crazing failures of these brittle materials and delamination [1][2][3][4][5]. Plasma treatment of the polymer surface before deposition forms a thick interphase layer consisting of an inorganic coating and the polymer. This gives a more uniform stress distribution and improves adhesion and mechanical properties [6].To reduce mechanical failure, additional elastic coatings are used to reduce the mismatch. One possible approach is to use organic-inorganic (O-I) materials. For example, the use of O-I SiOCH layers deposited by plasma-enhanced chemical vapor deposition (PECVD) obtained low-k dielectrics with improved mechanical properties for new microelectronic devices [7,8]. Higher durability and improved color stability of O-I coatings were observed in prosthetic dentistry applications [9]. In AR coatings, Schulz et al. proposed the use of an O-I approach consisting of a low index material obtained by plasma etching of a polymer layer sandwiched between two SiO 2 layers [10].Ion-beam-assisted chemical vapor deposition (IBACVD) was introduced into the laboratory process where O-I optical coatings are prepared by using ion bombardment through a precursor atmosphere toward a substrate. The O-I coatings exhibit enhanced elastic recovery, higher strain to failure, and lower water uptake compared to standard mineral SiO 2 layers [11]. When incorporated in AR coating stacks on plastic optics, their presence results in enhanced thermomechanical properties and higher color stability. Improved elastoplastic properties were also shown for highindex O-I materials such as TiOSiCH [12]. The coating's hydrophobic characteristics improve the color stability [13] by preventing water from entering the pores, making O-I materials very attractive for use in ophthalmic applications.

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Section: Durability Of Single Layerssupporting

confidence: 84%

Section: Methodology Depositionmentioning

confidence: 99%

mentioning

confidence: 99%

mentioning

confidence: 99%

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Vacuum Polymerization of Active Devices

2016

59th Annual Technical Conference Proceedings

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“…The ion beam assisted chemical vapor deposition (IBA-CVD) method has been proposed for the synthesis of hybrid (organic-inorganic) optical coatings that allow one to control and increase the hardness and the elasticity (high elastic rebound of 80% and more), while well controlling the refractive index [264,265]. This technique is based on using an ion beam source in combination with an organic precursor injection (see figure 23(a)) that can be applied to retain the advantages of both the organic as well as inorganic characteristics, expressed by the 'hybridicity parameter' (the carbon-to-silicon ratio, C/Si).…”

Section: Complementary Processes and New Developmentsmentioning

confidence: 99%

Foundations of plasma enhanced chemical vapor deposition of functional coatings

Snyders

Hegemann

Thiry

et al. 2023

Plasma Sources Sci. Technol.

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Since decades, the PECVD (“Plasma Enhanced Chemical Vapor Deposition”) processes have emerged as one of the most convenient and versatile approaches to synthesizing either organic or inorganic thin films on many types of substrates, including complex shapes. As a consequence, PECVD is today utilized in many fields of application such as microelectronic circuit fabrication, optics/photonics, biotechnology, energy, smart textiles, and many others. Nevertheless, owing to the complexity of the process including numerous gas phase and surface reactions, the fabrication of tailor-made materials for a given application is still a major challenge in the field making it obvious that the mastery of the technique can only be achieved through the fundamental understanding of the chemical and physical phenomena involved in the film formation.In this context, the aim of this foundation paper is to share with the readers our perception and understanding of the basic principles behind the formation of PECVD layers considering the co-existence of different reaction pathways that can be tailored by controlling the energy dissipated in the gas phase and/or at the growing surface. We demonstrate that the key parameters controlling the functional properties of the PECVD films are similar whether they are inorganic or organic-like (plasma polymers) in nature, thus supporting a unified description of the PECVD process. Several concrete examples of the gas phase processes and the film behavior illustrate our vision.To complete the document, we also discuss the present and future trends in the development of the PECVD processes and provide examples of important industrial applications using this powerful and versatile technology.

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