2006
DOI: 10.1002/eqe.564
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Hybrid platform for high-tech equipment protection against earthquake and microvibration

Abstract: SUMMARYTo ensure the high quality of ultra-precision products such as semiconductors and optical microscopes, high-tech equipment used to make these products requires a normal working environment with extremely limited vibration. Some of high-tech industry centres are also located in seismic zones: the safety of high-tech equipment during an earthquake event becomes a critical issue. It is thus imperative to ÿnd an e ective way to ensure the functionality of high-tech equipment against microvibration and to pr… Show more

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Cited by 33 publications
(17 citation statements)
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“…Stöbener (2006) suggested using active vibration isolation platforms for protecting highly sensitive measurement equipment like atomic force microscopes from harmful vibrations. Xu and Li (2006) proposed the use of hybrid platforms for the protection of high-tech equipment such as semiconductors and optical microscopes from earthquakes. Semi-active vibration isolation was suggested by Gavin and Zaicenco (2007) in order to protect vibration-sensitive equipment from near-fault ground motions.…”
Section: Seismic Isolation and The Distribution Of Floor Accelerationsmentioning
confidence: 99%
“…Stöbener (2006) suggested using active vibration isolation platforms for protecting highly sensitive measurement equipment like atomic force microscopes from harmful vibrations. Xu and Li (2006) proposed the use of hybrid platforms for the protection of high-tech equipment such as semiconductors and optical microscopes from earthquakes. Semi-active vibration isolation was suggested by Gavin and Zaicenco (2007) in order to protect vibration-sensitive equipment from near-fault ground motions.…”
Section: Seismic Isolation and The Distribution Of Floor Accelerationsmentioning
confidence: 99%
“…Finally, with the equipment isolation approach, the isolation layer is directly installed between the equipment and the structural floor. This approach is particularly cost effective for cases where the protection of certain critical and vibration-sensitive equipment is required (Xu and Li, 2006;Lu and Lin, 2009).…”
Section: Introductionmentioning
confidence: 98%
“…Yang and Agrawal [8] performed an extensive numerical study on the possible use of hybrid isolation systems for both microvibration control and seismic response control of high-tech equipment. Xu and Li [9] recently proposed a large-scale two-layer hybrid platform, which works as a passive platform aiming at mitigating acceleration response of a batch of high-tech equipment during an earthquake and functioning as an actively controlled platform that intends to reduce velocity response of a batch of high-tech equipment under a normal working condition. The performance of the hybrid platform is promising but the study is an analytical study only.…”
Section: Introductionmentioning
confidence: 99%