We report on hybrid circuit QED experiments with focused ion beam implanted Er 3+ ions in Y 2 SiO 5 coupled to an array of superconducting lumped element microwave resonators. The Y 2 SiO 5 crystal is divided into several areas with distinct erbium doping concentrations, each coupled to a separate resonator. The coupling strength is varied from 5 MHz to 18.7 MHz, while the linewidth ranges between 50 MHz and 130 MHz. We confirm the paramagnetic properties of the implanted spin ensemble by evaluating the temperature dependence of the coupling. The efficiency of the implantation process is analyzed and the results are compared to a bulk doped Er:Y 2 SiO 5 sample. We demonstrate the successful integration of these engineered erbium spin ensembles with superconducting circuits.PACS numbers: 42.50. Pq, 76.30Kg A future quantum information technology will most probably rely on employing different quantum systems, where each subsystem is specialized on fulfilling distinct tasks 1,2 . For instance, modern superconducting (SC) quantum circuits are well suited for implementing scalable and fast quantum processors 3 . However, these SC qubits suffer from relatively short coherence times 4 . In contrast, spin doped solids possess long coherence times of up to a second 5 such that they can serve as a quantum memory. Hybrid circuit QED offers a promising way for implementing a complete quantum computer, i.e. a processor interfaced with a memory unit 6 .In the recent years, Y 2 SiO 5 (YSO) crystals doped with rare-earth (RE) ions have moved into the focus of quantum information science 7-9 . Additionally, strong coherent coupling of Er:YSO to a SC lumped element microwave resonator has been demonstrated 10 . Most of the current research activity relies on RE:YSO crystals which are typically grown using the Czochralski method, where the RE doping takes place during the growth process 11-13 .In this article, we focus on the practical implementation of a hybrid quantum system. In a practical circuit, memory elements need to be placed at specific positions, where they can fulfill their tasks without interfering with the rest of the quantum circuitry. One possible approach is to locally implant spins into an empty crystal or directly into the substrate where the circuit is fabricated on 14 . Recently, weak coupling (∼ 1 MHz) of a superconducting resonator to Gd 3+ ions implanted into a sapphire substrate has been reported 15 . Here, we employ YSO as a host material for RE ions, which promises long optical and spin coherence times [16][17][18] . Moreover, the optical transition of Er 3+ lies within the standard telecom C-band, which allows for the implementation of a reversible coherent microwave to optical interface for quantum communication 19,20 .In our work, we use a focused ion beam (FIB) to implant Er 3+ ions into an undoped Y 2 SiO 5 (YSO) crystal with high spatial resolution 21 . We then perform circuit QED experiments on these crystals and confirm the successful implantation of erbium ions by studying the electron spin r...