2007
DOI: 10.1134/s0020168507040061
|View full text |Cite
|
Sign up to set email alerts
|

Hydrocarbon impurities in SiF4 and SiH4 prepared from it

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

0
2
0

Year Published

2008
2008
2017
2017

Publication Types

Select...
4

Relationship

0
4

Authors

Journals

citations
Cited by 4 publications
(2 citation statements)
references
References 2 publications
0
2
0
Order By: Relevance
“…According to figure 4, solid silicon granulates with natural isotope composition were converted to SiF 4 gas in the first step. SiF 4 is used as a process gas for the centrifugal separation of Si for two reasons: there exists only one isotope of fluorine, namely 19 F, and SiF 4 has a sufficiently high vapour pressure at room temperature.…”
Section: Enrichment Of 28 Si In Centrifugesmentioning
confidence: 99%
See 1 more Smart Citation
“…According to figure 4, solid silicon granulates with natural isotope composition were converted to SiF 4 gas in the first step. SiF 4 is used as a process gas for the centrifugal separation of Si for two reasons: there exists only one isotope of fluorine, namely 19 F, and SiF 4 has a sufficiently high vapour pressure at room temperature.…”
Section: Enrichment Of 28 Si In Centrifugesmentioning
confidence: 99%
“…The content of polysilanes and disiloxanes is the largest component according to the data of a gas-chromatographic-mass-spectrometric (GC-MS) analysis at a level of 10 −3 mol mol −1 . Calcium hydride seems to be the main source of impurities, in particular carbon [19].…”
Section: Silanisation and Purification Of Silanementioning
confidence: 99%