1988
DOI: 10.1016/0168-583x(88)90315-1
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Hydrogen and deuterium depth profiling by elastic recoil detection analysis

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Cited by 24 publications
(22 citation statements)
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“…Nuclear reaction analysis (NRA) via the 1 H( 15 N,) 12 C reaction using 15 N ion beams above the 6.385-MeV energy resonance is a well-established and powerful method for nanometer-resolved depth profiling of hydrogen ( 1 H) in the near-surface region of solids [1][2][3][4]. 15 N-1 H NRA quantitatively reveals the 1 H depth distribution in the analyzed target by registering the emitted -rays as a function of the 15 N incidence energy.…”
Section: Introductionmentioning
confidence: 99%
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“…Nuclear reaction analysis (NRA) via the 1 H( 15 N,) 12 C reaction using 15 N ion beams above the 6.385-MeV energy resonance is a well-established and powerful method for nanometer-resolved depth profiling of hydrogen ( 1 H) in the near-surface region of solids [1][2][3][4]. 15 N-1 H NRA quantitatively reveals the 1 H depth distribution in the analyzed target by registering the emitted -rays as a function of the 15 N incidence energy.…”
Section: Introductionmentioning
confidence: 99%
“…15 N-1 H NRA quantitatively reveals the 1 H depth distribution in the analyzed target by registering the emitted -rays as a function of the 15 N incidence energy. At typical beam sizes of a few mm 2 , 1 H( 15 N,) 12 C NRA depth-selectively determines the 1 H content in electrical conductors as well as in insulating samples with a sensitivity of ~110 13 cm -2 for 1 H at surfaces and ~110 18 cm -3 (~100 ppm) 1 H in the bulk within several tens of minutes, irrespective of the chemical binding state of 1 H [5]. The technique is most elegantly performed with a scintillation detector positioned behind the target outside of the analyzing vacuum system, which provides accessibility for in-situ sample characterization and manipulation through surface science instrumentation [3][4][5].…”
Section: Introductionmentioning
confidence: 99%
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