Hydrogen-free DLC films fabricated using superimposed HiPIMS-DCMS deposition system: Bias voltage effects

Chen, Yanjun; Su, Fenghua; Li, Haichao; Li, Qiang; Sun, Jining; Lin, Shisheng

doi:10.1016/j.surfcoat.2023.129820

Cited by 16 publications

(2 citation statements)

References 57 publications

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“…In our research, we decided to use the high-power magnetron sputtering of a graphite target to produce DLC layers on nonpolarized and intentionally unheated substrates. Such conditions for synthesizing carbon layers correspond to the known HIPMS [31,32] mode of the magnetron operation, which seems to provide the most favorable conditions for synthesizing carbon layers with a high content of sp 3 bonds in the carbon layer [33][34][35][36][37]. This is because the plasma produced in HIPMS is characterized by a relatively high supply of carbon vapors, a high degree of ionization resulting from the simultaneous interaction of many plasma ionization mechanisms, and an ion energy that may exceed the energy of ions produced in the dcMS mode by orders of magnitude [3,38].…”

Section: Introductionmentioning

confidence: 95%

Optical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique

Skowronski,

Chodun,

Trzcinski

et al. 2023

Materials

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This paper reports the results of amorphous carbon thin films fabricated by using the gas-impulse-injection magnetron-sputtering method and differing the accelerating voltage (1.0–1.4 kV). The obtained layers were investigated using Raman spectroscopy, X-ray photoelectron spectroscopy (XRD), and spectroscopic ellipsometry (SE). The analysis of the Raman and XPS spectra point to the significant content of sp3 hybridization in the synthesized materials (above 54–73%). The refractive index of the films is very high—above 2.45 in the infrared spectral range. The band-gap energy (determined using the inversed-logarithmic-derivative method) depends on the discharging voltage and is in the range from 1.58 eV (785 nm) to 2.45 eV (506 nm). Based on the obtained results, we have elaborated a model explaining the a-C layers’ formation process.

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Section: Introductionmentioning

confidence: 95%

Optical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique

Skowronski,

Chodun,

Trzcinski

et al. 2023

Materials

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“…Applying bias voltage during the deposition of N-DLC and DLC films influences film growth, adhesion strength, residual stress, surface energy, and interface morphology [17,18]. Higher biasing voltages enhance film-substrate interactions, leading to denser films with stronger adhesion, while lower voltages may result in weaker adhesion [19].…”

Section: Introductionmentioning

confidence: 99%

Nitrogen-Doped Diamond-like Carbon Buffer Layer Enhances the Mechanical and Tribological Properties of Diamond-like Carbon Films Deposited on Nitrile Rubber Substrate

Song,

Han,

Zhen

et al. 2024

Coatings

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The poor adhesion between the DLC film and rubber restricts its application of seals. Introducing a suitable interlayer can bolster the adhesion of the coating or film. In this study, nitrogen-doped diamond-like carbon (N-DLC) emerged as the optimal intermediate layer between rubber and DLC. A series of N-DLC/DLC multilayer films were fabricated via DC magnetron sputtering on nitrile rubber (NBR) substrates, varying the substrate bias voltage (0 V, 100 V, 200 V). A scanning electron microscopy analysis revealed that the composite film surface was smoother than the DLC film alone. The results of Raman spectroscopy and X-ray photoelectron spectroscopy indicated a robust bond between nitrogen and carbon atoms in the composite film, with nitrogen facilitating the conversion of sp3C-C bonds into sp2C=C. Mechanical tests demonstrated that the N-DLC interlayer improved film adhesion and reduced the CoF of the composite film to 0.2–0.3. Specifically, the CoF of the N-DLC/DLC film prepared at 100 V was as low as 0.20, with a wear amount of 1.13 mg. Consequently, the inclusion of the N-DLC interlayer substantially enhanced the mechanical and tribological properties of DLC-coated NBR, rendering this coating highly advantageous for various applications.

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Enhancing sp3 formation in DLC on low thermal conductivity substrate: Interval deposition minimizing ion energy sensitivity

Ai,

Wu,

Zhang

et al. 2024

Diamond and Related Materials

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Hydrogen-free DLC films fabricated using superimposed HiPIMS-DCMS deposition system: Bias voltage effects

Cited by 16 publications

References 57 publications

Optical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique

Optical Properties of Amorphous Carbon Thin Films Fabricated Using a High-Energy-Impulse Magnetron-Sputtering Technique

Nitrogen-Doped Diamond-like Carbon Buffer Layer Enhances the Mechanical and Tribological Properties of Diamond-like Carbon Films Deposited on Nitrile Rubber Substrate

Enhancing sp3 formation in DLC on low thermal conductivity substrate: Interval deposition minimizing ion energy sensitivity

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