Hydrogen-damaged defects of heavily deformed iron, AISI 304-, and 316-stainless steels were investigated by measuring Doppler broadening energy spectra (DBES) of positron annihilation radiation. It is interestingly found that S-parameter as a function of energy on three kinds of deformed samples falls into the similar variation, independent of chemical elements and impurities. A larger S value near the surface in deformed and hydrogen-damaged samples than in samples without hydrogen-damaged samples is because of the additional larger-sized defects (e.g. voids) induced due to hydrogen damage.1 Introduction Positron annihilation spectroscopy (PAS) has been widely used as a probe for the determination of defects at the atomic level in solids, including vacancies, vacancy clusters, dislocations, and nanometer-scale voids [1]. The use of variable mono-energy positron beams allows one to determine the depth profile of defects in solids, and is particularly suitable for analysis of surface and near-surface defects [2]. Hydrogen damage or hydrogen embrittlement (HE) of iron and steels has been investigated by PAS methods for many years.The effect of hydrogen and helium on microvoid formation in iron and nickel has been studied by positron annihilation lifetime (PAL) and coincidence Doppler broadening (CDB) [3]. Takagi et al. [4] reported PAL measurement by slow positron beam in iron films, hydrogeninduced vacancies were grown under different hydrogen pressures. Cizek et al.[5] studied hydrogeninduced defects in bulk niobium by XRD and PAS, and they indicated that vacancy-hydrogen complexes were introduced into the samples due to hydrogen loading. Recently, Wu et al. [6][7][8] studied hydrogeninduced defects and hydrogen damage by PAL and slow positron beam in annealed AISI 304 and 316 stainless steels, and indicated that hydrogen damage starting from surface to the bulk had a significant difference with depth, and strongly depends on the condition of hydrogen-charging. In this paper, we further report hydrogen-damaged defects of heavily deformed iron, AISI 304-, and 316-stainless steels by measuring Doppler broadening energy spectra (DBES) of positron annihilation radiation. The type of hydrogen-damaged defects near the surface on three kinds of deformed samples is discussed.