2009
DOI: 10.1016/j.ceramint.2008.04.005
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Hydrogen-induced degradation in SrTiO3-based grain boundary barrier layer ceramic capacitors

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Cited by 14 publications
(4 citation statements)
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“…Hydrogen changes the properties of a wide variety of oxides; for example, hydrogen chemically reacts 1.17 0.68 with oxygen adsorbed onto the surface of metal-oxide semiconductors such as SnO 2 and ZnO, changing their resistance; such materials are used for hydrogen sensors. 25) Another example is that hydrogen changes the properties of oxide-based dielectric materials such as TiO 2 , 26) Ta 2 O 5 , 27) HfO 2 , 28) Pb(Zr,Ti)O 3 , 29) SrBi 2 Ta 2 O 9 , 30) SrTiO 3 , 31) and BaTiO 3 , 32) confirming that hydrogen clearly lowers the resistance of most of these materials, consistent with the results in Table III. The proposed mechanism for oxide resistance reduction is as follows: 29,31) hydrogen atoms are ionized in the oxide materials, producing protons and free electrons.…”
supporting
confidence: 70%
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“…Hydrogen changes the properties of a wide variety of oxides; for example, hydrogen chemically reacts 1.17 0.68 with oxygen adsorbed onto the surface of metal-oxide semiconductors such as SnO 2 and ZnO, changing their resistance; such materials are used for hydrogen sensors. 25) Another example is that hydrogen changes the properties of oxide-based dielectric materials such as TiO 2 , 26) Ta 2 O 5 , 27) HfO 2 , 28) Pb(Zr,Ti)O 3 , 29) SrBi 2 Ta 2 O 9 , 30) SrTiO 3 , 31) and BaTiO 3 , 32) confirming that hydrogen clearly lowers the resistance of most of these materials, consistent with the results in Table III. The proposed mechanism for oxide resistance reduction is as follows: 29,31) hydrogen atoms are ionized in the oxide materials, producing protons and free electrons.…”
supporting
confidence: 70%
“…25) Another example is that hydrogen changes the properties of oxide-based dielectric materials such as TiO 2 , 26) Ta 2 O 5 , 27) HfO 2 , 28) Pb(Zr,Ti)O 3 , 29) SrBi 2 Ta 2 O 9 , 30) SrTiO 3 , 31) and BaTiO 3 , 32) confirming that hydrogen clearly lowers the resistance of most of these materials, consistent with the results in Table III. The proposed mechanism for oxide resistance reduction is as follows: 29,31) hydrogen atoms are ionized in the oxide materials, producing protons and free electrons. These protons bond to oxygen atoms and can be mobile in the oxide materials.…”
supporting
confidence: 70%
“…According to our previous study involving GaN MOS capacitors, 13 oxide layers between Pt and GaN are the most likely origin of the change in the Pt/GaN interface oxide resistance because hydrogen was found to be absorbed into the oxide layers as positive mobile charges. Third, hydrogen-induced property changes in oxides have been reported for various oxides, including TiO 2 , 21 Ta 2 O 5 , 22 HfO 2 , 23 Pb(Zr,Ti)O 3 , 24 SrBi 2 Ta 2 O 9 , 25 SrTiO 3 , 26 and BaTiO 3 ; 27 hydrogen is known to reduce the resistance of these oxides. Hydrogen is ionized in the oxides, and electrons emitted from hydrogen contribute to the lowering of the resistance.…”
Section: Resultsmentioning
confidence: 99%
“…Hydrogen is ionized in the oxides, and electrons emitted from hydrogen contribute to the lowering of the resistance. 24,26,28 We assume that the same phenomenon occurs in the Pt/GaN interface oxide. We subsequently investigated the reaction timeframe of a Pt/GaN SBD under a hydrogen ambient atmosphere.…”
Section: Resultsmentioning
confidence: 99%