Hydrogen influence on the structure and properties of amorphous hydrogenated carbon films deposited by direct ion beam

Radiation induced changes in amorphous hydrogenated DLC films

“…It fits well with the shifting of G-peak towards higher wave numbers and broadening of the FWHM G as it was proposed in Ref. [19] and correlates well with our results of ellipsometric measurements and results presented by other authors [12,33].…”

“…The main characteristics of as grown films were described in previous papers: sp 3 content and density of the films were evaluated from the results of Raman spectroscopy [18] and the hydrogen concentration was obtained by elastic recoil detection (ERD) method [19]. According to Robertson [2] all initial samples from the first group (1E, 2E, 3E) were classified as diamond-like a-C:H (DLCH) films, and the samples from the second group (4GM/E) as polymer-like a-C:H (PLCH) films.…”

Determining the content and binding energy of hydrogen in diamond films

“…Hydro gen determines the properties of hydrogenated graphene [3] and diamond particles [4,5]. It was shown in [6] that thermal treatment in hydrogen atmosphere in the temperature range conventionally used for the CVD growth of diamond films (600-700°C) leads to a partial transformation of nanograph ite to nanodiamond. It was found in [7] that there exists an optimal hydrogen concentration in the gas phase at which the sp 3 /sp 2 phase ratio in hydrogenated carbon films is at a maximum.…”

Modification of the amorphous carbon films by the ns-laser irradiation

“…The hydrogen addition formed the films with higher hardness, lower thickness, and lower refractive and extinction indexes. The RS results showed that the introduction of the additional hydrogen increased the sp 3 fraction of the C-C bonds in the film [2,15].…”