Intense soft X-ray illumination near the carbon core edge induces significant structural damage in tetrahedral amorphous carbon films and less significant but detectable defect formation in single-walled carbon nanotubes (SWNTs). The efficiency spectra of the photo-induced damage commonly show a resonant peak between the π * and σ * peaks of X-ray absorption spectra in addition to a non-resonant background. The resonant damage cannot be explained by the coreexciton mechanism but can be attributed to a recoil damage accompanying the photo-desorption of heavy chemisorbates that is resonantly decomposed by the spectator Auger mechanism. The cause of the non-resonant damage in SWNTs may be attributed to anomalous radiation damage by low-energy electrons generated by secondary effects of soft X-ray illumination, which is supported by the recent finding by authors that hot electron injection from probe tips of scanning tunneling microscopes generates defects in the SWNT samples.