In the hydrogen separation membrane, a dense TaTiNbZr amorphous layer was prepared between Pd and Ta to form a Pd/TaTiNbZr/Ta membrane system to prevent the reaction between Pd and Ta at high temperatures. The structural and chemical stability of the Pd/TaTiNbZr/Ta film system at high temperatures were investigated by annealing at 600 °C for 24 h. The high-temperature hydrogen permeation properties of the Pd/TaTiNbZr/Ta film systems were investigated by hydrogen permeation experiments at 600 °C after heat treatment for 6 h. The TaTiNbZr layer was significantly hydrogen-permeable. With the increase in the thickness of the barrier layer, the hydrogen permeability of Pd/TaTiNbZr/Ta decreased, but its hydrogen permeation flux was smaller than that of the highest value of Pd/Ta when it reached the steady state. The presence of the TaTiNbZr layer effectively blocks the interdiffusion between Pd and Ta to form TaPd3, improving the sustained working ability of the Pd/TaTiNbZr/Ta membrane system. The results show that TaTiNbZr is a candidate material for the intermediate layer to improve the high-temperature stability of metal-composite hydrogen separation membranes.