2018
DOI: 10.20535/2523-4455.2018.23.5.141665
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Hydrogen Peroxide Measurements by MISFET and LET Structures with Rear Porous Silicon Layer and Metallic Nanoparticles

Abstract: In the paper hydrogen peroxide MISFET and LET sensor performance is investigated. As hydrogen peroxide is a product of many chemical reactions, especially biological reactions, peroxide sensors are now widely used for detection of another. In this work, a combination of two nanostructures that are now used for hydrogen peroxide detection-porous silicon and metal nanoparticles was used. A MISFET (metal-insulator-semiconductor field effect transistor) was chosen as the basic sensor but unlike conventional FET se… Show more

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