Hydrogen-related
technologies are rapidly developing, driven by
the necessity of efficient and high-density energy storage. This poses
new challenges to the detection of dangerous gases, in particular
the realization of cheap, sensitive, and fast hydrogen sensors. Several
materials are being studied for this application, but most present
critical bottlenecks, such as high operational temperature, low sensitivity,
slow response time, and/or complex fabrication procedures. Here, we
demonstrate that WO3 in the form of single-crystal, ultrathin
films with a Pt catalyst allows high-performance sensing of H2 gas at room temperature. Thanks to the high electrical resistance
in the pristine state, this material is able to detect hydrogen concentrations
down to 1 ppm near room temperature. Moreover, the high surface-to-volume
ratio of WO3 ultrathin films determines fast sensor response
and recovery, with characteristic times as low as 1 s when the concentration
exceeds 100 ppm. By modeling the hydrogen (de)intercalation dynamics
with a kinetic model, we extract the energy barriers of the relevant
processes and relate the doping mechanism to the formation of oxygen
vacancies. Our results reveal the potential of single-crystal WO3 ultrathin films toward the development of sub-ppm hydrogen
detectors working at room temperature.