2002
DOI: 10.1063/1.1450044
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Hydrogen response mechanism of Pt–GaN Schottky diodes

Abstract: Besides silicon carbide, group-III nitrides are also suitable large-band-gap semiconductor materials for high-temperature gas sensor devices. Exposing GaN-based Schottky diodes with catalytically active platinum electrodes to hydrogen, we observed a decrease of the rectifying characteristics which we attribute to a decrease in Schottky barrier height. Current–voltage and elastic recoil detection measurements were used to investigate the H-sensing behavior of such devices. Our results indicate an interfacial ef… Show more

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Cited by 200 publications
(128 citation statements)
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“…GaN-related materials with wide energy gaps maintain semiconducting properties at high temperatures, making them suitable for sensors operating at high-temperatures. However, only few works have been reported on GaN gas sensors [1,2] with an unclear sensing mechanism. This paper investigates H 2 gas-sensing characteristics of Pt/GaN and Pt/AlGaN/GaN Schottky diodes.…”
Section: Introductionmentioning
confidence: 99%
“…GaN-related materials with wide energy gaps maintain semiconducting properties at high temperatures, making them suitable for sensors operating at high-temperatures. However, only few works have been reported on GaN gas sensors [1,2] with an unclear sensing mechanism. This paper investigates H 2 gas-sensing characteristics of Pt/GaN and Pt/AlGaN/GaN Schottky diodes.…”
Section: Introductionmentioning
confidence: 99%
“…For these reasons, they are potentially suited to sensor application in addition to blue/UV photonic applications and high-power heterostructure field effect transistor (HFET) application. In fact, there are several reports on GaN-based hydrogen sensors [3][4][5]. Among them, we investigated the Pt Schottky diode-type H 2 gas sensor formed on the AlGaN/GaN heterostructure surface in view of possible integration of sensors with HFET circuits on the same chip.…”
Section: Introductionmentioning
confidence: 99%
“…V DS is utilized to measure the response to the target gas (Lloyd Spetz et al, 2013b). The study, evaluation, and choice of the catalytic material and its support (the gate dielectric) are important because the electrical performance of FET sensor devices as well as the chemical reactions responsible for the gas response depend on the type and nanostructure of the sensing layer processed onto the device , in conjunction with the nature and quality of the gate insulator (Schalwig et al, 2002;Eriksson et al, 2005).…”
Section: Introductionmentioning
confidence: 99%