Tritium permeation barrier is required in fusion blanket for reduction of loss of fuel and health hazard. In this study, deuterium permeation experiments have been 2 performed on four kinds of steels and erbium oxide coatings fabricated by a filtered arc deposition method. The permeation flux of uncoated samples shows diffusion-limited regime in the temperature range 573−723 K and the permeability is corresponding to literature data. The coated samples deposited at room temperature have been tested at 773 K. It is found that the coatings suppress the deuterium permeation to a close level in spite of different types of steel substrates. In addition, the exponent of the driving pressure slightly changes compared to the uncoated sample. However, the permeation regime is still near diffusion limited.