2006
DOI: 10.1016/j.diamond.2005.10.049
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Hydrogenated amorphous carbon film coating of PET bottles for gas diffusion barriers

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Cited by 95 publications
(65 citation statements)
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“…Overall, these bands are characteristic of PLC structures and consistent with those reported in the literature. 9,11,12,23,24 In fact, better defined C-H bands were observed for the samples prepared at higher acetylene partial pressure and higher PECVD chamber pressure. As observed in other studies, 12 the a-C:H film structure can change from DLC to PLC as the total pressure is increased even at the same partial pressure of methane and argon.…”
mentioning
confidence: 81%
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“…Overall, these bands are characteristic of PLC structures and consistent with those reported in the literature. 9,11,12,23,24 In fact, better defined C-H bands were observed for the samples prepared at higher acetylene partial pressure and higher PECVD chamber pressure. As observed in other studies, 12 the a-C:H film structure can change from DLC to PLC as the total pressure is increased even at the same partial pressure of methane and argon.…”
mentioning
confidence: 81%
“…The effect of pressure and acetylene partial pressure on the structural characteristics of a-C:H films can be attributed to the impact energy of the ionic species generated in plasma. 9,10,19,24 It is established that the energy of incident ions decreases as the pressure increases and the mean free path decreases. 19 According to literature, 9 ions with sufficient energy to reach the surface of a-C:H films are inserted following the subplantation model.…”
Section: Raman Analysismentioning
confidence: 99%
“…Derived from the hydrogen contained in acetylene molecules, the resultant carbon thin films contain hydrogen components up to 40% in atomic percentage. ERDA (Elastic Recoil Detection Analysis) analyses showed oxygen components up to 10% may be present in the carbon thin films [4,28], which is considered to be mainly derived from water vapor from PET substrates. The advantage of the use of acetylene lies in high deposition rates and economics, while CH4 (methane) is used in many studies [4,26].…”
Section: Difference In and Between Carbon And Silicate Oxide Coatingsmentioning
confidence: 99%
“…Dense structures of the thin films, typically several tens of nanometers in thickness, behave like glass or ceramics, and block the passage of gas permeants. The current approach generally uses two types of thin film species, that is, (A) carbon thin films, often described as diamond-like carbon (DLC) or a-C:H [3,4], or (B) silicate oxide thin films, often described as SiOx, where x is a number and often somewhere between 1.5 to 1.8 [3,12].…”
Section: Thin Film Coating For the Gas Barrier Enhancement Of Pet Botmentioning
confidence: 99%
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