Filmes finos de carbono amorfo hidrogenado (a-C:H) têm sido depositados na superfície de materiais para melhorar propriedades mecânicas, ópticas e químicas. Nesse estudo, foi empregado o sistema de deposição química assistida por plasma (PECVD) para sintetizar filmes de a-C:H com fases DLC (tipo diamante) e PLC (tipo polimérico). As pressões parciais de acetileno em argônio foram variadas e as estruturas dos produtos analisadas pela técnica de espectroscopia de reflexão-absorção no infravermelho (IRRAS) e Raman. Além disso, a morfologia e as espessuras dos filmes foram determinadas por microscopia de força atômica (AFM) e perfilometria, respectivamente.Hydrogenated amorphous carbon (a-C:H) thin films were synthesized on the surface of materials to improve mechanical, optical and chemical properties. In the present study, plasma enhanced chemical vapor deposition (PECVD) was performed to produce a-C:H films with PLC (polymer like carbon) and DLC (diamond like carbon) phases. The influences of the acetylene partial pressure and chamber pressure on the chemical structures of the products were evaluated by infrared reflection absorption spectroscopy (IRRAS) and Raman spectroscopy. Moreover, the morphology and thickness of the films were investigated by atomic force microscopy (AFM) and profilometry, respectively.Keywords: amorphous hydrogenated carbon, PECVD, parameters, diamond like carbon, polymer like carbon
IntroductionA considerable amount of research has been conducted on hydrogenated amorphous carbon (a-C:H) thin films 1,2 due to their beneficial effects on the mechanical, optical and chemical properties of materials, particularly for food packaging purposes because of the enhancement of gas barrier properties. [1][2][3][4][5] In addition, the a-C:H have been studied as a functional barrier to avoid or reduce the migration of possible residual contaminants from recycled polymers. 6 a-C:H films possess sp 3 -, sp 2 -and sp 1 -hybridized carbons, 7 whose proportion significantly affects their physical and chemical properties. Films with a high percentage of sp 3 carbon have properties similar to those of diamonds, such as superior hardness, chemical inertness and high electrical resistance. Alternatively, films with a significant amount of sp 2 -hybridized carbon are soft like polymers and called PLC (polymer-like carbon). 7,8,9 The a-C:H films can be synthesized by methods such as ion beam deposition, magnetron sputtering, pulsed laser deposition and plasma enhanced chemical vapor deposition (PECVD). 10-13 PECVD films are usually prepared with high frequency (13.56 MHz) low-temperature plasma from a hydrocarbon precursor gas, typically methane, acetylene, ethylene or benzene. The ions and radicals generated by dissociation/ionization of those gases impinge on the substrates leading to film growth. [13][14][15][16] The physical and chemical properties of a-C:H films deposited by PECVD are dependent on the deposition parameters, including the pressure and gas composition in the plasma chamber. The energy of the ...