“…On the other hand, sol-gel, reactive sputtering, vacuum evaporation, chemical vapor deposition and so on have been also studied to fabricate anatase-TiO 2 layer [6]- [8], in which the orientation, the surface roughness, the defects etc. are expected to be control in addition to fabrication of the multilayer [9]. Especially, chemical vapor deposition (CVD) with great merit for conformal formation of the layer on three-dimensionally structured surface is so useful to control the orientation.…”