Hydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer deposition

Mitchell, David R. G.; Triani, Gerry; Zhang, Zhaoming

doi:10.1016/j.tsf.2008.04.052

Cited by 19 publications

(18 citation statements)

References 32 publications

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“…The obtained value (1.2) is lower than the theoretical one for crystalline TiO 2 in anatase phase ( n TiO2 = 2.2–2.5). This may be explained by the amorphous nature of the as‐grown ALD TiO 2 and to a probable incomplete decomposition of the TTIP precursor . Moreover, the infiltrated opals exhibit a broad photonic band‐gap peak, revealing that the infiltration is not homogeneous and it is not sufficient in the deeper layers, so non‐uniform properties of the TiO 2 infiltrated structure are obtained, as previously observed from SEM analyses (Fig.…”

Section: Resultssupporting

confidence: 70%

“…ALD was already successfully used to deposit metal oxides on polymeric surfaces . For example, Liang et al deposited alumina and titania films on porous poly(styrene‐divinylbenzene) particles ; Mitchell et al obtained titania thin films at temperatures compatible with polymeric substrates (80 °C) ; and Wang et al used ALD as the first step of their procedure to obtain nanostructured TiO 2 nanobowls .…”

Section: Methodsmentioning

confidence: 99%

“…ALD was already successfully used to deposit metal oxides on polymeric surfaces [43]. obtained titania thin films at temperatures compatible with polymeric substrates (80 8C) [48]; and Wang et al used ALD as the first step of their procedure to obtain nanostructured TiO 2 nanobowls [49]. TiO 2 was deposited by a custom-made ALD system operating at 50 8C and at 0.7 mbar.…”

Section: Ps Direct Opal Infiltration With Tio 2 Viamentioning

confidence: 99%

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Co₃O₄/TiO₂heterostructures obtained by hybrid method

Habra¹,

Visentin²,

Gerbasi³

et al. 2015

Phys. Status Solidi A

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High surface‐to‐volume ratio Co3O4/TiO2 heterojunctions were fabricated by combining different methods. Atomic layer deposition (ALD) and a photochemical method were used to coat polystyrene (PS) 3D‐Direct Opal (3D‐DO) structures on conductive ITO substrates. Firstly, 3D‐DO of PS were crystallized on ITO substrates to form the high surface‐to‐volume ratio template via a self‐assembly method. A low‐temperature ALD TiO2 film was infiltrated onto the PS opal structure. Then, the PS template was removed by a thermal treatment in air at 450 °C for 5 h. Hollow anatase phase nanospheres were obtained, crystallized in a face centered cubic (FCC) lattice with the (111) plane oriented parallel to the substrate surface. Finally, the hollow TiO2 nanospheres were coated with Co3O4 via a photochemical method. This ordered 3D nanostructure with designed morphology may find applications as surface‐enhanced materials for photovoltaic devices. TiO2 hollow nanospheres obtained via low‐pressure ALD (a) and Co3O4/TiO2 heterostructure (scanned region: 1.5 μm) (b).

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Section: Resultssupporting

confidence: 70%

Section: Methodsmentioning

confidence: 99%

Section: Ps Direct Opal Infiltration With Tio 2 Viamentioning

confidence: 99%

See 1 more Smart Citation

Co₃O₄/TiO₂heterostructures obtained by hybrid method

Habra¹,

Visentin²,

Gerbasi³

et al. 2015

Phys. Status Solidi A

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“…However, such composites generally have a small relative permittivity due to low permittivity inter‐particle barriers and strong interfacial polarization . Hydrothermal processing of powders or dried amorphous films in an aqueous environment at high pressure can prepare or crystallize fine grain materials from sol–gel derived amorphous precursors at temperatures in the range 100–220 °C. The starting material for a sol–gel composite is a slurry of high permittivity BST powder particles suspended in a BST sol.…”

Section: Introductionmentioning

confidence: 99%

Powder selection for hydrothermally processed sol–gel composite barium strontium titanate capacitors

Sayer

Freundorfer

et al. 2017

Physica Status Solidi (a)

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Ba 0.7 Sr 0.3 TiO 3 (BST) capacitors for high frequency circuits have been fabricated at 175 8C on epoxy-based copper-clad printed circuit boards, having a glass transition temperature of $200 8 C by hydrothermal processing of dried BST acetatebased sol-gel powder slurries. The film thickness was 2-10 mm. BST powders were prepared respectively as ceramic derived powders processed from oxide mixtures fired to 1100 8C, sol-gel derived powders fired to 750 and 1100 8C, and a low temperature solution process dried at 500 8C. The performance of the capacitor was determined by both the dielectric properties of the powder and the interaction between the crystallizing gel and the powder surface. High relative permittivity is obtained for sol-gel derived powders fired to 750 8C, while high voltage tunability is a characteristic of the ceramic derived powders. Low temperature powders are ineffective. The difference is attributed to the nature of the crystalline interface formed between the surface of the powder particles and the hydrothermally crystallized BST formed from the dried gel within the composite. The optimum molar concentration of the hydrothermal solution was 0.1 M with a Ba content larger than that of the powder. Capacitor composites having a relative permittivity of up to 300 at 20 MHz were demonstrated.

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“…It was already successfully used to deposit metal oxides on polymeric surfaces. Liang et al deposited alumina and titania films on porous poly(styrene‐divinylbenzene) particles; Mitchell et al obtained titania thin films at a temperature suitable to polymeric substrate (80 °C); and, in the aforementioned work of Wang, ALD method was used to obtain nanostructured TiO 2 nanobowls . Sun et al deposited amorphous TiO 2 film on a moving substrate under atmospheric pressure and at room temperature …”

Section: Introductionmentioning

confidence: 99%

Hybrid Synergic Methodology to Prepare ALD Honey‐Comb Anatase Films

Visentin

Habra

Favaro

et al. 2015

Chemical Vapor Deposition

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Macroporous inorganic structures with high surface-to-volume ratio have been recognized as a centre of interest in many fields. Here, attention is focused on a hybrid synergic methodology to prepare honey-comb (HC) anatase TiO 2 films with increased specific surface area. The breath figures (BFs) method is exploited to produce HC polystyrene (PS) templates and atomic layer deposition (ALD) is used to conformally cover them with a TiO 2 coating. Different approaches are tested to preserve the HC-TiO 2 structure during the conversion of the hybrid organic/inorganic materials into crystalline anatase films. Best results are obtained operating with ALD at 180°C on pre-UV cross-linked substrates.

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Hydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer deposition

Cited by 19 publications

References 32 publications

Co₃O₄/TiO₂heterostructures obtained by hybrid method

Co₃O₄/TiO₂heterostructures obtained by hybrid method

Powder selection for hydrothermally processed sol–gel composite barium strontium titanate capacitors

Hybrid Synergic Methodology to Prepare ALD Honey‐Comb Anatase Films

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Hydrothermal crystallization of amorphous titania films deposited using low temperature atomic layer deposition

Cited by 19 publications

References 32 publications

Co3O4/TiO2heterostructures obtained by hybrid method

Co3O4/TiO2heterostructures obtained by hybrid method

Powder selection for hydrothermally processed sol–gel composite barium strontium titanate capacitors

Hybrid Synergic Methodology to Prepare ALD Honey‐Comb Anatase Films

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Product

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Co₃O₄/TiO₂heterostructures obtained by hybrid method

Co₃O₄/TiO₂heterostructures obtained by hybrid method