Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy

Yen, Ping-Lang; Yan, Mu-Tian; Chen, Yil

doi:10.1002/asjc.453

Cited by 19 publications

(13 citation statements)

References 25 publications

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“…Apart from model-based control methods, advanced controllers, such as the model predictive control (MPC) scheme [50,121], adaptive control scheme [122,123], H ∞ [65,[124][125][126], artificial neural networks (ANNs) [127,128], fuzzy logic control [129,130], sliding mode control [131], repetitive control [132][133][134], and iterative learning control (ILC) [47], have been designed to compensate the hysteresis effect in an AFM's PTS.…”

Section: Compensation Of Hysteresis Effectmentioning

confidence: 99%

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Rana

Pota

Petersen

2018

Asian Journal of Control

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In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. For control engineers, the PTS is particularly interesting since its ability to enable the AFM to undertake 3D imaging is entirely dependent upon the use of a feedback loop. However, it suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low-frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; (iii) the cross-coupling effect between its axes (in 3D positioning systems such as AFMs); and (iv) effect of thermal drift. This article presents a survey of the literature on the PTS, an overview of a few existing innovative solutions for its nanopositioning and future research directions. This article will help the reader to walk around the present development of the PTS aimed at meeting the requirements for high-speed AFM imaging.

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Section: Compensation Of Hysteresis Effectmentioning

confidence: 99%

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Rana

Pota

Petersen

2018

Asian Journal of Control

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“…for the mechanical side of the actuator system, and the other state variables for the electrical side are x5 = U2, x6 = Uh, x7 = Up and x8 = q. The state equations for x 1, x 2 , x 3 and x 4 can be obtained from the terms in the transfer functions in (5). Also, the state equation for x U 5 2 = can be derived from the fact that by…”

Section: Considered Electromechanical Modelmentioning

confidence: 99%

“…The control method used in our approach to achieve our aims in terms of the scanning speed and the quality of images on the AFM can be summarized in three major features as compared to the previous approaches. [1][2][3][4][5][6][7][8][9][10][11][15][16][17][18][19][20][21][22][23][24].…”

Section: Introductionmentioning

confidence: 99%

Robust H^∞ Control in Fast Atomic Force Microscopy

Cui¹,

Petersen²,

Pota³

2012

Asian Journal of Control

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This paper develops a robust H ∞ method for fast tracking position control problems arising in an atomic force microscope (AFM). A commercial type NT‐MDT AFM is used to generate 3D images of scanned material surfaces at high speeds and accuracies. A major component of this AFM is a piezoelectric tube actuator used for position control in three directions. Due to the nature of the piezoelectric actuator, there is nonlinear hysteresis present which affects the AFM scanning qualities. The original commercial AFM uses traditional proportional‐integral‐derivative position control and can only obtain good quality images for scanning rates under about 20 Hz in both the x and y directions. In this paper, a robust H ∞ controller is designed based on a physical model of the AFM piezoelectric tube positioner in the x and y directions. On the electrical side of the positioning system, external capacitors are connected in series with the x and y contacts of the piezoelectric tube to provide measured voltages which are proportional to the charge on the actuator. The parameters for a nonlinear model are obtained from measurements of the system frequency response and time domain response. This model also takes into account the time delay resulting from the sensor electronics. This nonlinear model is represented as a linear uncertain system model with norm bounded uncertainty. The uncertain system model is used to design a robust H ∞ tracking controller for the AFM scanning system. Experimental results show that the robust H ∞ controller can improve the AFM scanning quality and increase the scanning speed significantly. The controller performs well in tracking a given reference scanning signal with frequencies up to 125 Hz.

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“…Wu & Zou, 2007). Alternative advanced control techniques are effectively used, such as adaptive control (Yen, Yan, & Chen, 2012), optimal control (Kucuk, Yildirim, & Adali, 2015), intelligent control (Lin & Li, 2014) and sliding mode control (SMC) (Liaw et al, 2008). SMC techniques are powerful control methods which showed superior properties by dealing with uncertain linear and nonlinear systems.…”

Section: Introductionmentioning

confidence: 99%

A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems

Al-Ghanimi

Zheng

Man

2016

International Journal of Control

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Piezoelectric actuators (PEAs) are the key devices in micro/nano positioning system. However, the PEA performance is significantly degraded by the inherent non-linear behaviour. This behaviour is a consequence of the hysteresis properties contained within PEAs. Therefore, in micro/nano positioning applications a robust control system has to be adopted for such actuators. This paper proposes a systematic control method that utilizes a fast non-singular terminal sliding mode (FNTSM) based on online perturbation estimation technique for PEAs. Unlike other sliding mode methods, the FNTSM control method is characterised by chatter free. Besides, a zero error convergence can be guaranteed in finite time in the presence of disturbance and system uncertainties (i.e., hysteresis and gain changes). The design of the FNTSM control based on perturbation estimation (FNTSMPE) is presented. A model-free robust exact differentiator is used to estimate the states of the feedback system from merely measurable position signal. Theoretical analysis and the experimental results of FNTSMPE control reveal that high-precision and robust performance is achieved in comparison with ordinary FNTSM control.

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Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy

Cited by 19 publications

References 25 publications

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Robust H^∞ Control in Fast Atomic Force Microscopy

A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems

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Hysteresis Compensation and Adaptive Controller Design for a Piezoceramic Actuator System in Atomic Force Microscopy

Cited by 19 publications

References 25 publications

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

A Survey of Methods Used to Control Piezoelectric Tube Scanners in High‐Speed AFM Imaging

Robust H∞ Control in Fast Atomic Force Microscopy

A fast non-singular terminal sliding mode control based on perturbation estimation for piezoelectric actuators systems

Contact Info

Product

Resources

About

Robust H^∞ Control in Fast Atomic Force Microscopy