2018
DOI: 10.3390/mi9050241
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Hysteresis Compensation and Sliding Mode Control with Perturbation Estimation for Piezoelectric Actuators

Abstract: Based on the background of atomic force microscope (AFM) driven by piezoelectric actuators (PEAs), this paper proposes a sliding mode control coupled with an inverse Bouc–Wen (BW) hysteresis compensator to improve the positioning performance of PEAs. The intrinsic hysteresis and creep characteristics degrade the performance of the PEA and cause accuracy loss. Although creep effect can be eliminated by the closed-loop control approach, hysteresis effects need to be compensated and alleviated by hysteresis compe… Show more

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Cited by 34 publications
(22 citation statements)
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“…The I-M compensator using iterative structure has superior performance in accuracy and response speed, but it may appear that the parameter identified by PMPI model does not satisfy Equation (16). Once this happens, the proportional gain k e u d (k) addressed in Equation (20) can be introduced to adjust the ratio between the MPI and memoryless polynomial part.…”
Section: Stability Analysismentioning
confidence: 99%
See 1 more Smart Citation
“…The I-M compensator using iterative structure has superior performance in accuracy and response speed, but it may appear that the parameter identified by PMPI model does not satisfy Equation (16). Once this happens, the proportional gain k e u d (k) addressed in Equation (20) can be introduced to adjust the ratio between the MPI and memoryless polynomial part.…”
Section: Stability Analysismentioning
confidence: 99%
“…Because of the high accuracy and flexibility, the phenomenological model is more popular in hysteresis modeling. The phenomenological models include Preisach model [11,12], polynomial model [13,14], Bouc-Wen model [15,16], Duhem model [17,18], neural network model [19,20], Prandtl-Ishlinskii (PI) model [21][22][23], and etc. Among them, because of simple expression and analytical inverse model, the PI model is the most widely used in hysteresis modeling and compensation.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, many intelligent control algorithms have been proposed to achieve higher robustness and adaptability. For instance, sliding mode control has been proposed to improve the accuracy and the robustness against noise and disturbances [14,21]. A linearization control method with feedforward hysteresis compensation and proportional-integral-derivative (PID) feedback has also been proposed [22].…”
Section: Introductionmentioning
confidence: 99%
“…Sun and Li proposed H ∞ control compensation, based on BW model [22]. And a sliding model control for the hysteresis compensation of piezo actuator with a inverse BW model was proposed by Ding and Li [23]. However, few studies has been focused on the parameters and optimization of BW model.…”
Section: Introductionmentioning
confidence: 99%