Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge

El-Fayoumi, I M; Jones, Ian Rees; Turner, M. M.

doi:10.1088/0022-3727/31/21/014

Cited by 109 publications

(113 citation statements)

References 16 publications

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“…Specifically, for inductively-coupled (IC) discharge plasmas, bistabilities have been studied for a long time, resulting in a large number of reports [97,98,99,100,120,121,119,122,123]. For example, Fig.…”

Section: Optical Bistability Of the Waveguide Nanoplasmamentioning

confidence: 99%

Extreme-ultraviolet light generation in plasmonic nanostructures

et al. 2013

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The present (cumulative) thesis examines fundamentals of nanostructure-enhanced extreme-ultraviolet light generation in noble gases using two different nanostructure geometries for local field-enhancement. Specifically, resonant antennas and tapered hollow waveguide nanostructures are utilized to enhance low-energy femtosecond laser pulses, which in turn induce light emission from excited xenon, argon and neon atoms and ions. Spectral analysis of this radiation reveals that coherent high-order harmonic generation is not feasible under the examined conditions, contrary to former expectations and reports. Instead, the spectral characteristics unequivocally identify that incoherent fluorescence from multiphoton excited and strong-field ionized gas atoms is the predominant process in such schemes. Furthermore, novel nanostructure-enhanced effects are reported such as surface-enhanced fifth-order harmonic generation (from bow-tie nanoantennas) and the formation of a bistable nanoplasma (in a hollow waveguide). These effects offer intriguing links between nonlinear nano-optics, plasma dynamics and extreme-ultraviolet radiation.v vi

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Section: Optical Bistability Of the Waveguide Nanoplasmamentioning

confidence: 99%

Extreme-ultraviolet light generation in plasmonic nanostructures

et al. 2013

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“…9,26 The typical planar induction coil excites ͕B r , B , B z ͖ and ͕E r , E , E z ͖ ͑radial, azimuthal, and axial͒ magnetic and electric field components, respectively. 9,13,27 These fields are basically complex quantities, and inclusion of the phase relation among them will be quite complicated. Therefore, to make the point by avoiding the complications of heavy mathematics, further discussion will be presented in terms of real field amplitudes only.…”

Section: Poynting Vector Representation For the Pure E And H Modementioning

confidence: 99%

“…9,13,27 The phase between magnetic fields ͑B r and B z ͒ and electric field ͑E ͒ will shift depending on the en / rf ratio. 26,27 The average power delivered from the rf coil ͑EM wave͒ to the electrons through inductive coupling is given by integrating the Poynting vector over the volume under the coil. The Poynting vector in H mode reads…”

Section: Poynting Vector Representation For the Pure E And H Modementioning

confidence: 99%

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Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Singh

2008

Journal of Applied Physics

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Please check the document version of this publication:• A submitted manuscript is the version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research.• You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement: The electron energy distribution function ͑EEDF͒ with respect to the hysteresis loop of an inductively coupled argon discharge has been studied experimentally. Contrary to H mode, knowledge of EEDF in E mode is still limited, and an elaborate EEDF measurement with regard to power and pressure for this mode is presented. The Langmuir probe measurements reveal two regions with distinct EEDFs in E mode, which might be a critical missing factor in explaining the unresolved hysteresis and mode transition phenomenon of inductive discharges. Furthermore, a Poynting vector representation has been used to explain the power coupling in an inductive discharge, where ͑azimuthal͒ e component is proposed to be dominant in the "hybrid mode" region.

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“…Most often, the studied ICPs have external 1,5,6,8 or internal cylindrical coils 3 but hysteresis has also been reported in external flat coil ICPs. 2,4,7 The work is predominantly with driving voltages at rf frequencies of 13.56 MHz 1,3,5-8 but hysteresis has also been observed in ICPs driven at 0.56 MHz ͑Ref. 2͒ and 500 kHz.…”

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confidence: 99%

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

Daltrini

Moshkalev

Morgan

et al. 2008

Applied Physics Letters

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An experimental investigation of the argon plasma behavior near the E–H transition in an inductively coupled Gaseous Electronics Conference reference cell is reported. Electron density and temperature, ion density, argon metastable density, and optical emission measurements have been made as function of input power and gas pressure. When plotted versus plasma power, applied power corrected for coil and hardware losses, no hysteresis is observed in the measured plasma parameter dependence at the E–H mode transition. This suggests that hysteresis in the E–H mode transition is due to ignoring inherent power loss, primarily in the matching system.

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Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge

Cited by 109 publications

References 16 publications

Extreme-ultraviolet light generation in plasmonic nanostructures

Extreme-ultraviolet light generation in plasmonic nanostructures

Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Plasma power measurement and hysteresis in the E–H transition of a rf inductively coupled plasma system

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