Rolled-up nanomembrane electrodes are used to prepare optically transparent [Formula: see text] Schottky diodes suitable for deep level transient photocapacitance spectroscopy. It is demonstrated that both the binding energy and the capture cross section of the oxygen vacancy can be extracted from the photocapacitance transients using a rate equation model. The values are consistent with those obtained from conventional deep level transient spectroscopy, taken from the same sample. Furthermore, information about the capture process can be extracted.