1990
DOI: 10.1063/1.102517
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I ns i t u low-temperature deposition and properties of Bi(Pb)-Sr-Ca-Cu-O thin films prepared by magnetron sputtering

Abstract: Superconducting thin films of the Bi-Sr-Ca-Cu-O system with and without lead doping were prepared by rf magnetron sputtering onto (100)MgO substrates. Although the superconducting properties of the thin films are very sensitive to the deposition and soak temperatures, reproducible results were obtained. Our in situ deposition process with processing temperatures not exceeding 600 °C yielded films with zero resistance at 82 K and Jc=7×105 A cm−2 measured at 4 K for the two-layer Bi phase. Our initial results wi… Show more

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Cited by 25 publications
(1 citation statement)
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“…This type of annealing causes undesirable substrate interactions and also induces surface roughness which makes a device fabrication difficult [5,6]. To obtain high quality thin films, one must carefully choose a suitable substrate and an optimal thermal treatment (partial melting temperature, annealing temperature and time, cooling rate, etc.).…”
Section: Introductionmentioning
confidence: 99%
“…This type of annealing causes undesirable substrate interactions and also induces surface roughness which makes a device fabrication difficult [5,6]. To obtain high quality thin films, one must carefully choose a suitable substrate and an optimal thermal treatment (partial melting temperature, annealing temperature and time, cooling rate, etc.).…”
Section: Introductionmentioning
confidence: 99%