An YNi 2 B 2 C thin film deposited on an Y 2 O 3 -buffered (001) MgO substrate by pulsed laser deposition has been investigated by X-ray diffraction, transmission electron microscopy (TEM), and high-resolution electron microscopy. Cross-sectional TEM analyses show that the YNi 2 B 2 C film grows in the [001] direction while the Y 2 O 3 buffer layer exhibits columnar growth in the [001] and [111] directions on the (001) MgO substrate, with the growth in the [001] direction being preferred. The orientation relationships of the YNi 2 B 2 C film, Y 2 O 3 buffer layer, and MgO substrate were obtained. The primary orientation relationship YNi, evident from X-ray analyses, was able to be confirmed in the TEM study. A hexagonal impurity phase Y 0.915 Ni 4.12 B with lattice parameters a ) 1.491 nm and c ) 0.692 nm was identified at the interface between the Y 2 O 3 buffer layer and the YNi 2 B 2 C thin film.