2020
DOI: 10.1039/d0cp03644g
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In situ anion-doped epitaxial strontium titanate films

Abstract: Misfit strains arising from a film-substrate mismatch can induce novel phases and properties in epitaxial films of perovskite oxides. Here we employ yet another effect, namely, strain-assisted formation of oxygen...

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Cited by 6 publications
(10 citation statements)
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“…2 h) agrees perfectly with this scenario. Notably, the NNO/LAO behavior is consistent with the out-of-plane dipolar orientation in compressively strained films of SrTiO 3 and BaTiO 3 , where in addition to the lattice expansion, an internal electric field also evidenced the dipolar orientation 11 13 . The out-of-plane dipoles correspond to vacancies in the [NdO] planes in NNO (Fig.…”
Section: Resultssupporting
confidence: 63%
“…2 h) agrees perfectly with this scenario. Notably, the NNO/LAO behavior is consistent with the out-of-plane dipolar orientation in compressively strained films of SrTiO 3 and BaTiO 3 , where in addition to the lattice expansion, an internal electric field also evidenced the dipolar orientation 11 13 . The out-of-plane dipoles correspond to vacancies in the [NdO] planes in NNO (Fig.…”
Section: Resultssupporting
confidence: 63%
“…Epitaxial and polycrystalline STO films were grown by pulsed laser deposition, during which anion dopants and/or oxygen vacancies were introduced in-situ by varying the ambient gas (“ Methods ”) 33 . The content δ of oxygen vacancies/substitutions was to ~ 0.3 in SrTiO 3-δ X δ (Supplementary section S1 ).…”
Section: Resultsmentioning
confidence: 99%
“…Thin STO films (thicknesses of 80–100 nm) were grown by pulsed laser deposition, during which anion dopants and/or oxygen vacancies were introduced in-situ by varying the ambient gas 33 . Epitaxially polished (001) (La 0.3 Sr 0.7 )(Al 0.65 Ta 0.35 )O 3 substrates (LSAT) and silicon substrates covered with native surface oxide (Si/SiO 2 ) were used to prepare epitaxial and polycrystalline films, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…We investigated the conductivity in epitaxial and polycrystalline films, where oxygen vacancies, nitrogen substitutions, or hydrogen substitutions were introduced in-situ during film growth. [39][40] To diminish possible impact of surface 2DEG, we determined the conductivity in the films sandwiched between the bottom and top electrodes in the vertical structures. To avoid injection of excess carriers and inspect intrinsic conductivity, we applied small-signal AC impedance spectroscopy.…”
mentioning
confidence: 99%
“…We investigated the conductivity in thin (80-100 nm) epitaxial and polycrystalline STO films, which were grown in pairs within a single pulsed laser deposition process, thus ensuring similar chemical composition for both films in each pair. 39 Epitaxial films were prepared on (001) (La0.3Sr0.7)(Al0.65Ta0.35)O3 substrates using epitaxial LaNiO3 bottom electrodes, whereas polycrystalline films were formed on Pt-coated Si substrates. Oxygen substitution was implemented by varying the gas ambience during deposition.…”
mentioning
confidence: 99%