Our study shows that deposited Ge and Si dielectric thin-films can exhibit low microwave losses at near single-photon powers and sub-Kelvin temperatures (≈40 mK). This low loss enables their use in a wide range of devices, including low-loss coplanar, microstrip, and stripline resonators, as well as layers for device isolation, inter-wiring dielectrics, and passivation in microwave and Josephson junction circuit fabrication. We use coplanar microwave resonator structures with narrow trace widths of 2-5 μm to maximize the sensitivity of loss tangent measurements to the interface and properties of the deposited dielectrics, rather than to optimize the quality factor. In this configuration, thermally-evaporated ≈1 μm thick amorphous germanium (a-Ge) films deposited on Si (100) have a single photon loss tangent of 1-2×10 -6 and, 9 μm-thick chemical vapor deposited (CVD) homoepitaxial Si has a single photon loss tangent of 0.6-2×10 -5 . Simulations indicate that interface losses are non-negligible.