2017
DOI: 10.1103/physrevapplied.7.034009
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In Situ Monitoring of the Thermal-Annealing Effect in a Monolayer of MoS2

Abstract: We perform in-situ two-cycle thermal cycling and annealing studies for a transferred CVDgrown monolayer MoS2 on a SiO2/Si substrate, using spatially resolved micro-Raman and PL spectroscopy. After the thermal cycling and being annealed at 305 °C twice, the film morphology and film-substrate bonding are significantly modified, which together with the removal of polymer residues cause major changes in the strain and doping distribution over the film, and thus the optical properties. Before annealing, the strain … Show more

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Cited by 29 publications
(19 citation statements)
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“…The annealing process, as shown in the AFM images in Fig. 2d–f and supported by the literature 9 21 51 , removes residual PMMA and water while promoting surface adhesion. Therefore, the post annealing results allow us to separate out the effects from the transfer process and analyze the substrate effects on the flakes.…”
Section: Resultssupporting
confidence: 82%
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“…The annealing process, as shown in the AFM images in Fig. 2d–f and supported by the literature 9 21 51 , removes residual PMMA and water while promoting surface adhesion. Therefore, the post annealing results allow us to separate out the effects from the transfer process and analyze the substrate effects on the flakes.…”
Section: Resultssupporting
confidence: 82%
“…In order to further study the surface interaction, the sample is finally annealed under Ar:H 2 (5:1) gas mixture at 300 °C for two hours. This annealing step has been shown to be crucial in removing excess PMMA and promote surface adhesion 9 21 51 . Specifically in the case of MoS 2 51 , annealing times in excess of 90 minutes are shown, via Raman and PL, to have increased the post transfer substrate bonding, creating an increased strain on the monolayer TMD.…”
Section: Resultsmentioning
confidence: 99%
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“…It has been documented that 2D films like monolayer MoS 2 and WS 2 usually form significant chemical bonding with the substrates on which they are grown. [29][30][31] Given the predicted weak but signifiant chemical bonding between graphene and silicene, [12,15] we expect that the thin diamond-like Si strcuture could experience some tensile epitaxial strain from the graphite substrate. [12,15] The strain could qualitatively explain the variation in redshift that is larger for the Based on the phonon frequency change between diamond F 2g mode (~1300 cm -1 ) and graphene E 2g mode (~1600 cm -1 ), one would expect that the silicene E 2g phonon frequency to be roughly in proportion higher than that of bulk Si at ~520 cm -1 .…”
mentioning
confidence: 99%
“…TMD monolayers have unique optical and electrical properties including high absorption relative to their thickness 1 , direct band gaps 2 4 , rapid charge separation 5 , and can even be ferromagnetic 6 8 or superconducting 9 11 . Due to their thinness, monolayer TMDs interact strongly with their environment; this strong interaction makes characterization of trapped contaminants, surface adsorbed contaminants, water layers, and the TMD-substrate step height necessary to predict and understand device operation 12 16 . Dynamic atomic force microscopy (dAFM), in which a nanoscopic tip is driven sinusoidally, can measure topography while providing a plethora of additional data channels for characterizing the surface absorbed contaminants.…”
Section: Introductionmentioning
confidence: 99%