Cu‐ and Fe‐ catalyzed trideuteromethylation reactions using alkylsilyl peroxide as trideuteromethyl radical precursor are reported. The alkylsilyl peroxide was synthesized from acetone‐d6 in a three‐step sequence, and the reactions with various coupling partners afforded efficiently the corresponding N–CD3, O–CD3 and C–CD3 bond formation products. The radical heptadeuteriopropylation using alkylsilyl peroxide prepared from butyric acid‐d7 is also described.