α-Ta films on c-plane sapphire with enhanced microstructure
Lena N. Majer,
Sander Smink,
Wolfgang Braun
et al.
Abstract:Superconducting films of α-Ta are promising candidates for the fabrication of advanced superconducting qubits. However, α-Ta films suffer from many growth-induced structural inadequacies that negatively affect their performance. We have therefore explored a new synthesis method for α-Ta films, which allows for the growth of these films with an unprecedented quality. Using this method, high quality α-Ta films are deposited at a comparably high substrate temperature of 1150 °C. They are single-phase α-Ta and hav… Show more
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