ICP polishing of silicon for high-quality optical resonators on a chip

Laliotis, Athanasios; Trupke, Michael; Cotter, J. P.; Lewis, Gareth Neil; Kraft, Michaël; Hinds, E. A.

doi:10.1088/0960-1317/22/12/125011

Cited by 12 publications

(12 citation statements)

References 25 publications

(39 reference statements)

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“…8(a)) and the maximum value is L = 350 μm for D = 550 μm and an etch time of 4 hr. This range for L is approximately seven times larger than previously reported for silicon hemispherical microcavities [1,2,5,7,8]. It was also found that L increases as D increases for a set etch time, where there is at least a 105% increase in L going from D = 100 μm to D = 550 μm.…”

Section: Micromirror Resultsmentioning

confidence: 50%

“…However, there has been little research on tuning α to a specific value, with the exception of a polishing method that uses an inductively coupled plasma etch to increase the radius of curvature of micromirrors after they are wet etched [7]. In terms of the cavity depth, the largest value of L reported for a hemispherical microcavity is 50 μm [7]. Short cavities have largely been pursued previously due to interest in using hemispherical cavities for experiments in cavity quantum electrodynamics, where a small mode volume is desirable.…”

Section: Hemispherical Microcavitiesmentioning

confidence: 99%

“…Concave structures for microscale optics have been fabricated using several methods, including isotropic etching in a mixture of hydrofluoric, nitric, and acetic acids (HNA) [1,2,7,12–15], etching in fluorine gas [5], inductively coupled plasma etching using fluorine-based chemistry [8,16], a combination of irradiation and wet etching [17,18], laser ablation [3,4,9,10], and focused ion beam milling [6]. Among these methods, etching silicon features through apertures in a hard mask using HNA results in low surface roughness and can achieve high throughput, making it an excellent choice for wafer-level fabrication of hemispherical microcavities.…”

Section: Concave Micromirror Fabricationmentioning

confidence: 99%

“…The other mirror can be an optical fiber or any other type of mirror. The second approach is to microfabricate a concave micromirror in a flat substrate, such as silicon [1,2,5,7,8] or glass [6]. While both approaches have advantages, the latter is of particular interest for optomechanical sensors because the wafer-scale fabrication processes facilitate direct integration with microelectromechanical systems and nanophotonics.…”

Section: Introductionmentioning

confidence: 99%

“…Silicon concave micromirrors with adequate surface shape and quality have been fabricated by several groups [1,2,5,7,8] and have been used to demonstrate microscale hemispherical cavities with a finesse of up to 64,000 [5]. In this paper, we explore the optimization of the geometric parameters of concave micromirrors to achieve stable silicon hemispherical microcavities for sensing applications.…”

Section: Introductionmentioning

confidence: 99%

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Concave silicon micromirrors for stable hemispherical optical microcavities

2017

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A detailed study of the fabrication of silicon concave micromirrors for hemispherical microcavities is presented that includes fabrication yield, surface quality, surface roughness, cavity depth, radius of curvature, and the aspect ratio between the cavity depth and radius of curvature. Most importantly, it is shown that much larger cavity depths are possible than previously reported while achieving desirable aspect ratios and nanometer-level roughness. This should result in greater frequency stability and improved insensitivity to fabrication variations for the mode coupling optics. Spectral results for an assembled hemispherical microcavity are presented, demonstrating that high finesse and quality factor are achieved with these micromirrors, F = 1524 and Q = 3.78 × 105, respectively.

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Section: Micromirror Resultsmentioning

confidence: 50%

Section: Hemispherical Microcavitiesmentioning

confidence: 99%

Section: Concave Micromirror Fabricationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Concave silicon micromirrors for stable hemispherical optical microcavities

2017

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Design and fabrication of diffractive atom chips for laser cooling and trapping

et al. 2016

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wide range of optical, electric and magnetic elements into atom chips, but the magneto-optical trap (MOT) [21,22]the element responsible for initial capture and cooling of the atoms-has remained external to the chip.An early attempt to integrate the MOT used deep pyramidal mirrors etched into a thick silicon substrate [8]. These manipulate a single incident laser beam into the overlapping beams required by a MOT. With beams of size L, the number of atoms captured scales as L 6 [9], a dependence that rolls over to L 3.6 as the size increases to some centimetres [21]. The large pyramids favoured by this scaling are not compatible with the normal 500 µm thickness of a silicon wafer. Although thick wafers are available, days of etching are needed to make pyramids of mm size and additional polishing is required to achieve optical quality surfaces [8,23,24]. For these reasons, the integrated pyramid is unsuitable for applications requiring more than ∼10 4 atoms. Figure 1 illustrates a recent extension of this idea where the MOT beams are now formed using microfabricated diffraction gratings, which replace the sloping walls of the pyramid [25,26]. The gratings are easily fabricated on any standard substrate material and can readily be made on the centimetre scale. This allows the MOT to capture up to 10 8 atoms above the surface of the chip, where they can be conveniently transferred to magnetic traps [3]. Because they only need a small depth of etching, the gratings preserve the 2D nature of the structure and sit comfortably with other elements on the chip. Alternatively, for devices that only require the reliable production of a MOT, the grating chip can be placed outside the wall of a glass cell and used to trap atoms on the inside. Figure 2 shows two 1D-grating MOT chips, which have already been demonstrated [1]. Chip A has three square grating areas arranged symmetrically to leave a plane area in the centre. Chip B has the same geometry, but the Abstract It has recently been shown that optical reflection gratings fabricated directly into an atom chip provide a simple and effective way to trap and cool substantial clouds of atoms (Nshii et al. in Nat Nanotechnol 8:321-324, 2013; McGilligan et al. in Opt Express 23(7):8948-8959, 2015). In this article, we describe how the gratings are designed and microfabricated and we characterise their optical properties, which determine their effectiveness as a cold atom source. We use simple scalar diffraction theory to understand how the morphology of the gratings determines the power in the diffracted beams.

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Achievements and perspectives of optical fiber Fabry–Perot cavities

et al. 2022

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Fabry–Perot interferometers have stimulated numerous scientific and technical applications ranging from high-resolution spectroscopy over metrology, optical filters, to interfaces of light and matter at the quantum limit and more. End facet machining of optical fibers has enabled the miniaturization of optical Fabry–Perot cavities. Integration with fiber wave guide technology allows for small yet open devices with favorable scaling properties including mechanical stability and compact mode geometry. These fiber Fabry–Perot cavities (FFPCs) are stimulating extended applications in many fields including cavity quantum electrodynamics, optomechanics, sensing, nonlinear optics and more. Here we summarize the state of the art of devices based on FFPCs, provide an overview of applications and conclude with expected further research activities.

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ICP polishing of silicon for high-quality optical resonators on a chip

Cited by 12 publications

References 25 publications

Concave silicon micromirrors for stable hemispherical optical microcavities

Concave silicon micromirrors for stable hemispherical optical microcavities

Design and fabrication of diffractive atom chips for laser cooling and trapping

Achievements and perspectives of optical fiber Fabry–Perot cavities

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