“…Similar methods have been used in the past to study various defects in silicon, including copper, 10 interstitial carbon, 11 boron-oxygen complexes, 12 boron-vacancy complexes, 13 boron interstitial structures, 14,15 self-interstitial clusters, 16 extended self-interstitial related defects, 17 and nitrogen. 18 The structure of the AsBV defect will be considered first.…”