Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

Benevicius, Vincas; Ostaševičius, Vytautas; Gaidys, Rimvydas

doi:10.3390/s130911184

Cited by 23 publications

(16 citation statements)

References 14 publications

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“…The main source of errors in MEMS accelerometers can be considered sensitive part sensor [9]. Errors in the readings of the three-axial accelerometer arise due to three factors [10 -12] associated with the structure of the board:…”

Section: Error Analysismentioning

confidence: 99%

Algorithm for increasing the accuracy of three-axis MEMS orientation sensors

2017

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Abstract. The authenticity of the readings of accelerometers and magnetometers is of great importance when using sensors in orientation systems. However, traditionally determined methods of calibration cannot always provide the necessary work and stability of indications. The method of calibration of MEMS accelerometers and magnetometers in the original setting of problems of identification of sensor parameters is considered in the article. The stochastic approach allows for the passage of a calibration from without an exact binding to a specific orientation of the accelerometer, since this does not require additional sensors to determine the angle of rotation. This allows us to use the algorithm for sensors, already fixed on the equipment. The experimental measurements were carried out using a three-axis MEMS sensor MPU-9265. The proposed method makes it possible to completely eliminate the displacement of zero, compensate for the non-unit scale of the axes, and also to determine the orientation of the sensitive axes of the magnetometer. The standard deviation of the experimental data from the reference cloud is less than 1%.

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Section: Error Analysismentioning

confidence: 99%

Algorithm for increasing the accuracy of three-axis MEMS orientation sensors

2017

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“…The maximum measurable acceleration was 325g. A three-axis accelerometer without detecting the acceleration direction was offered in (Benevicius et al 2013). In this accelerometer, in order to have a 3fF/g sensitivity and 1000g acceleration in the z axis direction, a dimension of at least 850*850um was needed for the plane beneath the weight.…”

Section: Introductionmentioning

confidence: 99%

“…This condition was realized by designing a proper spring. The main problem in (Benevicius et al 2013) was calculating acceleration in the direction of the other two axes with a very low sensitivity due to the change of capacitance caused by the change in the overlap area. For example, with 1um displacement, the capacitor value changed only about 2%, and for having a 3 fF/g sensitivity, only the acceleration of 20g could be measured.…”

Section: Introductionmentioning

confidence: 99%

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

2020

Informacije MIDEM

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In this paper a three-axis capacitor accelerometer has been designed, analyzed and optimized using microelectromechanical systems technology. The accelerometers are generally divided into three categories of single axis, two axes, and three axes in terms of their ability to measure acceleration. In the suggested structure, acceleration measurements are carried out on all three axes simultaneously using a mass and spring system, which makes it possible to achieve a high sensitivity at a low occupancy level without losing other accelerator factors. By taking difference in this structure, it is shown that each axis acceleration has a very low impact on the measured acceleration of the other two axes. If any external factor changes the value of a single capacitor, the original output of the capacitor does not change for detecting acceleration. In other words, the acceleration of any of these three axes, due to its designing features, does not influence the other two axes and the system performance cannot be disrupted by external factors. The other important characteristics of the accelerometers are dynamic range, operating frequency and sensitivity. This study covers a dynamic range up to 1000g and an operating frequency up to 20 kHz. The accelerometer sensitivity is 4 fF/g in the z axis direction while it is 9 fF/g in the x and y axes directions. In this paper, the simulation of the structure is performed using Intellisuite software. Moreover, a multi-objective genetic optimization algorithm has been used to determine the dimensions of the constituents of the spring and the weight.

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“…MEMS-based systems, in addition, proved to be efficient for several types of dynamic applications. Dynamic measurements of human body movements, for example, were carried out via MEMS accelerometers by Benevicius et al [20]. Hand-arm and whole-body MEMS-based vibration records were critically discussed, aiming at investigating the reliability of MEMS techniques for biomedical applications.…”

Section: Introduction State-of-the-art and Objectivesmentioning

confidence: 99%

Prototyping and Validation of MEMS Accelerometers for Structural Health Monitoring—The Case Study of the Pietratagliata Cable-Stayed Bridge

Bedon

Bergamo

Izzi

et al. 2018

JSAN

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In recent years, thanks to the simple and yet efficient design, Micro Electro-Mechanical Systems (MEMS) accelerometers have proven to offer a suitable solution for Structural Health Monitoring (SHM) in civil engineering applications. Such devices are typically characterised by high portability and durability, as well as limited cost, hence resulting in ideal tools for applications in buildings and infrastructure. In this paper, original self-made MEMS sensor prototypes are presented and validated on the basis of preliminary laboratory tests (shaking table experiments and noise level measurements). Based on the well promising preliminary outcomes, their possible application for the dynamic identification of existing, full-scale structural assemblies is then discussed, giving evidence of their potential via comparative calculations towards past literature results, inclusive of both on-site, Experimental Modal Analysis (EMA) and Finite Element Analytical estimations (FEA). The full-scale experimental validation of MEMS accelerometers, in particular, is performed using, as a case study, the cable-stayed bridge in Pietratagliata (Italy). Dynamic results summarised in the paper demonstrate the high capability of MEMS accelerometers, with evidence of rather stable and reliable predictions, and suggest their feasibility and potential for SHM purposes.

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Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

Cited by 23 publications

References 14 publications

Algorithm for increasing the accuracy of three-axis MEMS orientation sensors

Algorithm for increasing the accuracy of three-axis MEMS orientation sensors

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

Prototyping and Validation of MEMS Accelerometers for Structural Health Monitoring—The Case Study of the Pietratagliata Cable-Stayed Bridge

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